Vertical-Objective-Based Ellipsometric Microscope for Real-Time Observation of nm-Thick Lubricant Films
The vertical-objective-based ellipsometric microscope (VEM) is expected to be a useful method for clarifying the lubrication phenomena that uses thin liquid lubricants, especially the lubricant for hard disk drives (HDDs). Although the feasibility of VEM for thin lubricant films was confirmed, the d...
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| Auteurs principaux: | , , , , |
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| Format: | article |
| Langue: | EN |
| Publié: |
Japanese Society of Tribologists
2012
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| Accès en ligne: | https://doaj.org/article/852af9a131234568bb76f42f2a2176d1 |
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