Vertical-Objective-Based Ellipsometric Microscope for Real-Time Observation of nm-Thick Lubricant Films

The vertical-objective-based ellipsometric microscope (VEM) is expected to be a useful method for clarifying the lubrication phenomena that uses thin liquid lubricants, especially the lubricant for hard disk drives (HDDs). Although the feasibility of VEM for thin lubricant films was confirmed, the d...

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Autores principales:	Liu Qingqing, Kenji Fukuzawa, Yosuke Kajihara, Hedong Zhang, Shintaro Itoh
Formato:	article
Lenguaje:	EN
Publicado:	Japanese Society of Tribologists 2012
Materias:	ellipsometry lubricant film thickness vertical-objective-based ellipsometric microscope thickness resolution Physics QC1-999 Engineering (General). Civil engineering (General) TA1-2040 Mechanical engineering and machinery TJ1-1570 Chemistry QD1-999
Acceso en línea:	https://doaj.org/article/852af9a131234568bb76f42f2a2176d1
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id	oai:doaj.org-article:852af9a131234568bb76f42f2a2176d1
record_format	dspace
spelling	oai:doaj.org-article:852af9a131234568bb76f42f2a2176d12021-11-05T09:24:57ZVertical-Objective-Based Ellipsometric Microscope for Real-Time Observation of nm-Thick Lubricant Films1881-219810.2474/trol.7.139https://doaj.org/article/852af9a131234568bb76f42f2a2176d12012-09-01T00:00:00Zhttps://www.jstage.jst.go.jp/article/trol/7/3/7_139/_pdf/-char/enhttps://doaj.org/toc/1881-2198The vertical-objective-based ellipsometric microscope (VEM) is expected to be a useful method for clarifying the lubrication phenomena that uses thin liquid lubricants, especially the lubricant for hard disk drives (HDDs). Although the feasibility of VEM for thin lubricant films was confirmed, the designs for the optical system and image detection have not been established. In this report, the optical design of the VEM is presented, as well as the method of controlling the coherent noises and improving the thickness resolution is discussed. By our method, the thickness resolution of VEM can be improved to 0.4 nm, and the real-time observation of sub-nm-thick thin liquid lubricant films can also be achieved.Liu QingqingKenji FukuzawaYosuke KajiharaHedong ZhangShintaro ItohJapanese Society of Tribologistsarticleellipsometrylubricant film thicknessvertical-objective-based ellipsometric microscopethickness resolutionPhysicsQC1-999Engineering (General). Civil engineering (General)TA1-2040Mechanical engineering and machineryTJ1-1570ChemistryQD1-999ENTribology Online, Vol 7, Iss 3, Pp 139-146 (2012)
institution	DOAJ
collection	DOAJ
language	EN
topic	ellipsometry lubricant film thickness vertical-objective-based ellipsometric microscope thickness resolution Physics QC1-999 Engineering (General). Civil engineering (General) TA1-2040 Mechanical engineering and machinery TJ1-1570 Chemistry QD1-999
spellingShingle	ellipsometry lubricant film thickness vertical-objective-based ellipsometric microscope thickness resolution Physics QC1-999 Engineering (General). Civil engineering (General) TA1-2040 Mechanical engineering and machinery TJ1-1570 Chemistry QD1-999 Liu Qingqing Kenji Fukuzawa Yosuke Kajihara Hedong Zhang Shintaro Itoh Vertical-Objective-Based Ellipsometric Microscope for Real-Time Observation of nm-Thick Lubricant Films
description	The vertical-objective-based ellipsometric microscope (VEM) is expected to be a useful method for clarifying the lubrication phenomena that uses thin liquid lubricants, especially the lubricant for hard disk drives (HDDs). Although the feasibility of VEM for thin lubricant films was confirmed, the designs for the optical system and image detection have not been established. In this report, the optical design of the VEM is presented, as well as the method of controlling the coherent noises and improving the thickness resolution is discussed. By our method, the thickness resolution of VEM can be improved to 0.4 nm, and the real-time observation of sub-nm-thick thin liquid lubricant films can also be achieved.
format	article
author	Liu Qingqing Kenji Fukuzawa Yosuke Kajihara Hedong Zhang Shintaro Itoh
author_facet	Liu Qingqing Kenji Fukuzawa Yosuke Kajihara Hedong Zhang Shintaro Itoh
author_sort	Liu Qingqing
title	Vertical-Objective-Based Ellipsometric Microscope for Real-Time Observation of nm-Thick Lubricant Films
title_short	Vertical-Objective-Based Ellipsometric Microscope for Real-Time Observation of nm-Thick Lubricant Films
title_full	Vertical-Objective-Based Ellipsometric Microscope for Real-Time Observation of nm-Thick Lubricant Films
title_fullStr	Vertical-Objective-Based Ellipsometric Microscope for Real-Time Observation of nm-Thick Lubricant Films
title_full_unstemmed	Vertical-Objective-Based Ellipsometric Microscope for Real-Time Observation of nm-Thick Lubricant Films
title_sort	vertical-objective-based ellipsometric microscope for real-time observation of nm-thick lubricant films
publisher	Japanese Society of Tribologists
publishDate	2012
url	https://doaj.org/article/852af9a131234568bb76f42f2a2176d1
work_keys_str_mv	AT liuqingqing verticalobjectivebasedellipsometricmicroscopeforrealtimeobservationofnmthicklubricantfilms AT kenjifukuzawa verticalobjectivebasedellipsometricmicroscopeforrealtimeobservationofnmthicklubricantfilms AT yosukekajihara verticalobjectivebasedellipsometricmicroscopeforrealtimeobservationofnmthicklubricantfilms AT hedongzhang verticalobjectivebasedellipsometricmicroscopeforrealtimeobservationofnmthicklubricantfilms AT shintaroitoh verticalobjectivebasedellipsometricmicroscopeforrealtimeobservationofnmthicklubricantfilms
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Vertical-Objective-Based Ellipsometric Microscope for Real-Time Observation of nm-Thick Lubricant Films

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