Vertical-Objective-Based Ellipsometric Microscope for Real-Time Observation of nm-Thick Lubricant Films

The vertical-objective-based ellipsometric microscope (VEM) is expected to be a useful method for clarifying the lubrication phenomena that uses thin liquid lubricants, especially the lubricant for hard disk drives (HDDs). Although the feasibility of VEM for thin lubricant films was confirmed, the d...

Descripción completa

Guardado en:
Detalles Bibliográficos
Autores principales: Liu Qingqing, Kenji Fukuzawa, Yosuke Kajihara, Hedong Zhang, Shintaro Itoh
Formato: article
Lenguaje:EN
Publicado: Japanese Society of Tribologists 2012
Materias:
Acceso en línea:https://doaj.org/article/852af9a131234568bb76f42f2a2176d1
Etiquetas: Agregar Etiqueta
Sin Etiquetas, Sea el primero en etiquetar este registro!

Ejemplares similares