Vertical-Objective-Based Ellipsometric Microscope for Real-Time Observation of nm-Thick Lubricant Films

Vertical-Objective-Based Ellipsometric Microscope for Real-Time Observation of nm-Thick Lubricant Films

The vertical-objective-based ellipsometric microscope (VEM) is expected to be a useful method for clarifying the lubrication phenomena that uses thin liquid lubricants, especially the lubricant for hard disk drives (HDDs). Although the feasibility of VEM for thin lubricant films was confirmed, the d...

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Bibliographic Details
Main Authors: Liu Qingqing, Kenji Fukuzawa, Yosuke Kajihara, Hedong Zhang, Shintaro Itoh
Format: article
Language:EN
Published: Japanese Society of Tribologists 2012
Subjects:
ellipsometry
lubricant film thickness
vertical-objective-based ellipsometric microscope
thickness resolution
Physics
QC1-999
Engineering (General). Civil engineering (General)
TA1-2040
Mechanical engineering and machinery
TJ1-1570
Chemistry
QD1-999
Online Access:https://doaj.org/article/852af9a131234568bb76f42f2a2176d1
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