Evaporation Effect on Thickness Distribution for Spin-Coated Films on Rectangular and Circular Substrates

Spin-coating is widely applied in the field of thin-film fabrication due to its simplicity and high film uniformity. To prepare thin films on rectangular substrates by spin-coating, the simulation and experimental methods were used to study the characteristics of the film thickness in this work. The...

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Autores principales: Ying Yan, Jiarun Li, Qiuyu Liu, Ping Zhou
Formato: article
Lenguaje:EN
Publicado: MDPI AG 2021
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Acceso en línea:https://doaj.org/article/870ecc9fe41047c4b81e0269332f4ea6
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