Impact of process-dependent SiNx passivation on proton-induced degradation in GaN MIS-HEMTs

In this study, AlGaN/GaN heterojunction-based metal–insulator-semiconductor high-electron-mobility transistors (MIS-HEMTs) were fabricated using silicon nitride (SiN) passivation layer. This layer was deposited under the different gas ratio conditions. The effects of proton irradiation on the curren...

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Autores principales: Young Jun Yoon, Jae Sang Lee, In Man Kang, Eun Je Lee, Dong-Seok Kim
Formato: article
Lenguaje:EN
Publicado: Elsevier 2021
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SiN
Acceso en línea:https://doaj.org/article/8ef21a539e9b4c9482b3cd04df2bd39a
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