High quality Nb nanolayers as a base for superconducting spintronics
Advanced technological process for high quality Nb film preparation of large area (~600 mm2 ) and constant nanoscale thickness is developed. Homogeneity and proper thickness of the Nb layer were proved by the target-holder movement during the DC sputtering. The special protection cover Si-layer...
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| Format: | article |
| Langue: | EN |
| Publié: |
D.Ghitu Institute of Electronic Engineering and Nanotechnologies
2009
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| Accès en ligne: | https://doaj.org/article/9194d41920a64493a808274bc7558607 |
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