Enhancement of laser ablation via interacting spatial double-pulse effect

A novel spatial double-pulse laser ablation scheme is investigated to enhance the processing quality and efficiency for nanosecond laser ablation of silicon substrate. During the double-pulse laser ablation, two splitted laser beams simultaneously irradiate on silicon surface at a tunable gap. The a...

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Autores principales:	Zhou Rui, Lin Shengdong, Ding Ye, Yang Huan, Yong Keng Kenny Ong, Hong Minghui
Formato:	article
Lenguaje:	EN
Publicado:	Institue of Optics and Electronics, Chinese Academy of Sciences 2018
Materias:	double-pulse laser ablation efficiency quality Optics. Light QC350-467
Acceso en línea:	https://doaj.org/article/9921e474b7ea4b3485e76da5ea607e16
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spelling	oai:doaj.org-article:9921e474b7ea4b3485e76da5ea607e162021-11-11T10:06:42ZEnhancement of laser ablation via interacting spatial double-pulse effect2096-457910.29026/oea.2018.180014https://doaj.org/article/9921e474b7ea4b3485e76da5ea607e162018-11-01T00:00:00Zhttp://www.oejournal.org/article/doi/10.29026/oea.2018.180014https://doaj.org/toc/2096-4579A novel spatial double-pulse laser ablation scheme is investigated to enhance the processing quality and efficiency for nanosecond laser ablation of silicon substrate. During the double-pulse laser ablation, two splitted laser beams simultaneously irradiate on silicon surface at a tunable gap. The ablation quality and efficiency are evaluated by both scanning electron microscope and laser scanning confocal microscope. As tuning the gap distance, the ablation can be significantly enhanced if the spatial interaction between the two splitted laser pulses is optimized. The underlying physical mechanism for the interacting spatial double-pulse enhancement effect is attributed to the redistribution of the integrated energy field, corresponding to the temperature field. This new method has great potential applications in laser micromachining of functional devices at higher processing quality and faster speed.Zhou RuiLin ShengdongDing YeYang HuanYong Keng Kenny OngHong MinghuiInstitue of Optics and Electronics, Chinese Academy of Sciencesarticledouble-pulselaser ablationefficiencyqualityOptics. LightQC350-467ENOpto-Electronic Advances, Vol 1, Iss 8, Pp 180014-1-180014-6 (2018)
institution	DOAJ
collection	DOAJ
language	EN
topic	double-pulse laser ablation efficiency quality Optics. Light QC350-467
spellingShingle	double-pulse laser ablation efficiency quality Optics. Light QC350-467 Zhou Rui Lin Shengdong Ding Ye Yang Huan Yong Keng Kenny Ong Hong Minghui Enhancement of laser ablation via interacting spatial double-pulse effect
description	A novel spatial double-pulse laser ablation scheme is investigated to enhance the processing quality and efficiency for nanosecond laser ablation of silicon substrate. During the double-pulse laser ablation, two splitted laser beams simultaneously irradiate on silicon surface at a tunable gap. The ablation quality and efficiency are evaluated by both scanning electron microscope and laser scanning confocal microscope. As tuning the gap distance, the ablation can be significantly enhanced if the spatial interaction between the two splitted laser pulses is optimized. The underlying physical mechanism for the interacting spatial double-pulse enhancement effect is attributed to the redistribution of the integrated energy field, corresponding to the temperature field. This new method has great potential applications in laser micromachining of functional devices at higher processing quality and faster speed.
format	article
author	Zhou Rui Lin Shengdong Ding Ye Yang Huan Yong Keng Kenny Ong Hong Minghui
author_facet	Zhou Rui Lin Shengdong Ding Ye Yang Huan Yong Keng Kenny Ong Hong Minghui
author_sort	Zhou Rui
title	Enhancement of laser ablation via interacting spatial double-pulse effect
title_short	Enhancement of laser ablation via interacting spatial double-pulse effect
title_full	Enhancement of laser ablation via interacting spatial double-pulse effect
title_fullStr	Enhancement of laser ablation via interacting spatial double-pulse effect
title_full_unstemmed	Enhancement of laser ablation via interacting spatial double-pulse effect
title_sort	enhancement of laser ablation via interacting spatial double-pulse effect
publisher	Institue of Optics and Electronics, Chinese Academy of Sciences
publishDate	2018
url	https://doaj.org/article/9921e474b7ea4b3485e76da5ea607e16
work_keys_str_mv	AT zhourui enhancementoflaserablationviainteractingspatialdoublepulseeffect AT linshengdong enhancementoflaserablationviainteractingspatialdoublepulseeffect AT dingye enhancementoflaserablationviainteractingspatialdoublepulseeffect AT yanghuan enhancementoflaserablationviainteractingspatialdoublepulseeffect AT yongkengkennyong enhancementoflaserablationviainteractingspatialdoublepulseeffect AT hongminghui enhancementoflaserablationviainteractingspatialdoublepulseeffect
_version_	1718439238356172800

Enhancement of laser ablation via interacting spatial double-pulse effect

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