Enhancement of laser ablation via interacting spatial double-pulse effect
A novel spatial double-pulse laser ablation scheme is investigated to enhance the processing quality and efficiency for nanosecond laser ablation of silicon substrate. During the double-pulse laser ablation, two splitted laser beams simultaneously irradiate on silicon surface at a tunable gap. The a...
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| Auteurs principaux: | , , , , , |
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| Format: | article |
| Langue: | EN |
| Publié: |
Institue of Optics and Electronics, Chinese Academy of Sciences
2018
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| Sujets: | |
| Accès en ligne: | https://doaj.org/article/9921e474b7ea4b3485e76da5ea607e16 |
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