Enhancement of laser ablation via interacting spatial double-pulse effect
A novel spatial double-pulse laser ablation scheme is investigated to enhance the processing quality and efficiency for nanosecond laser ablation of silicon substrate. During the double-pulse laser ablation, two splitted laser beams simultaneously irradiate on silicon surface at a tunable gap. The a...
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| Autores principales: | , , , , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
Institue of Optics and Electronics, Chinese Academy of Sciences
2018
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/9921e474b7ea4b3485e76da5ea607e16 |
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