Universal perpendicular orientation of block copolymer microdomains using a filtered plasma

Dissimilar surface and interfacial energies of the two blocks in BCP thin films favour parallel orientations, whereas a perpendicular orientation is essential for directed self-assembly. Here, the authors demonstrate perpendicular microdomain orientations by filtered plasma treatment of the surface...

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Bibliographic Details
Main Authors: Jinwoo Oh, Hyo Seon Suh, Youngpyo Ko, Yoonseo Nah, Jong-Chan Lee, Bongjun Yeom, Kookheon Char, Caroline A. Ross, Jeong Gon Son
Format: article
Language:EN
Published: Nature Portfolio 2019
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Online Access:https://doaj.org/article/9d17da4e90224748ad850fe01bd7c047
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