High thermal durability of Ru-based synthetic antiferromagnet by interfacial engineering with Re insertion

Abstract Synthetic antiferromagnets (SAFs), composed of Ru spacer with a Re insertion layer, reveal superior thermal stability up to 450 °C annealing, making the back-end of line process a wider manufacturing window and tolerance to integrate the perpendicular magnetic tunneling junctions (P-MTJs) i...

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Autores principales: Chun-Liang Yang, Chih-Huang Lai
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2021
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Acceso en línea:https://doaj.org/article/9ebcece8d27c46ffb3e962415a426b1b
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