High thermal durability of Ru-based synthetic antiferromagnet by interfacial engineering with Re insertion
Abstract Synthetic antiferromagnets (SAFs), composed of Ru spacer with a Re insertion layer, reveal superior thermal stability up to 450 °C annealing, making the back-end of line process a wider manufacturing window and tolerance to integrate the perpendicular magnetic tunneling junctions (P-MTJs) i...
Saved in:
| Main Authors: | , |
|---|---|
| Format: | article |
| Language: | EN |
| Published: |
Nature Portfolio
2021
|
| Subjects: | |
| Online Access: | https://doaj.org/article/9ebcece8d27c46ffb3e962415a426b1b |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|