Highly Reliable Method to Obtain a Correlation Coefficient Unaffected by the SEM Noise Component for Examining the Degree of Specimen Damage due to Electron Beam Irradiation

A correlation coefficient is often used as a measure of the strength of a linear relationship (i.e., the degree of similarity) between two sets of data in a variety of fields. However, in the field of scanning electron microscopy (SEM), it is frequently difficult to properly use the correlation coef...

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Autores principales: Eisaku Oho, Kazuhiko Suzuki, Sadao Yamazaki
Formato: article
Lenguaje:EN
Publicado: Hindawi-Wiley 2021
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Acceso en línea:https://doaj.org/article/9f6119a750244c8785e63f51a84ce436
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