Highly Reliable Method to Obtain a Correlation Coefficient Unaffected by the SEM Noise Component for Examining the Degree of Specimen Damage due to Electron Beam Irradiation

A correlation coefficient is often used as a measure of the strength of a linear relationship (i.e., the degree of similarity) between two sets of data in a variety of fields. However, in the field of scanning electron microscopy (SEM), it is frequently difficult to properly use the correlation coef...

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Autores principales:	Eisaku Oho, Kazuhiko Suzuki, Sadao Yamazaki
Formato:	article
Lenguaje:	EN
Publicado:	Hindawi-Wiley 2021
Materias:	Microscopy QH201-278.5
Acceso en línea:	https://doaj.org/article/9f6119a750244c8785e63f51a84ce436
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id	oai:doaj.org-article:9f6119a750244c8785e63f51a84ce436
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spelling	oai:doaj.org-article:9f6119a750244c8785e63f51a84ce4362021-11-29T00:57:06ZHighly Reliable Method to Obtain a Correlation Coefficient Unaffected by the SEM Noise Component for Examining the Degree of Specimen Damage due to Electron Beam Irradiation1932-874510.1155/2021/2226577https://doaj.org/article/9f6119a750244c8785e63f51a84ce4362021-01-01T00:00:00Zhttp://dx.doi.org/10.1155/2021/2226577https://doaj.org/toc/1932-8745A correlation coefficient is often used as a measure of the strength of a linear relationship (i.e., the degree of similarity) between two sets of data in a variety of fields. However, in the field of scanning electron microscopy (SEM), it is frequently difficult to properly use the correlation coefficient because SEM images generally include severe noise, which affects the measurement of this coefficient. The current study describes a method of obtaining a correlation coefficient that is unaffected by SEM noise in principle. This correlation coefficient is obtained from a total of four SEM images, comprising two sets of two images with identical views, by calculating several covariance values. Numerical experiments confirm that the measured correlation coefficients obtained using the proposed method for noisy images are equal to those for noise-free images. Furthermore, the present method can be combined with a highly accurate and noise-robust position alignment as needed. As one application, we show that it is possible to immediately examine the degree of specimen damage due to electron beam irradiation during a certain SEM observation, which has been difficult until now.Eisaku OhoKazuhiko SuzukiSadao YamazakiHindawi-WileyarticleMicroscopyQH201-278.5ENScanning, Vol 2021 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Microscopy QH201-278.5
spellingShingle	Microscopy QH201-278.5 Eisaku Oho Kazuhiko Suzuki Sadao Yamazaki Highly Reliable Method to Obtain a Correlation Coefficient Unaffected by the SEM Noise Component for Examining the Degree of Specimen Damage due to Electron Beam Irradiation
description	A correlation coefficient is often used as a measure of the strength of a linear relationship (i.e., the degree of similarity) between two sets of data in a variety of fields. However, in the field of scanning electron microscopy (SEM), it is frequently difficult to properly use the correlation coefficient because SEM images generally include severe noise, which affects the measurement of this coefficient. The current study describes a method of obtaining a correlation coefficient that is unaffected by SEM noise in principle. This correlation coefficient is obtained from a total of four SEM images, comprising two sets of two images with identical views, by calculating several covariance values. Numerical experiments confirm that the measured correlation coefficients obtained using the proposed method for noisy images are equal to those for noise-free images. Furthermore, the present method can be combined with a highly accurate and noise-robust position alignment as needed. As one application, we show that it is possible to immediately examine the degree of specimen damage due to electron beam irradiation during a certain SEM observation, which has been difficult until now.
format	article
author	Eisaku Oho Kazuhiko Suzuki Sadao Yamazaki
author_facet	Eisaku Oho Kazuhiko Suzuki Sadao Yamazaki
author_sort	Eisaku Oho
title	Highly Reliable Method to Obtain a Correlation Coefficient Unaffected by the SEM Noise Component for Examining the Degree of Specimen Damage due to Electron Beam Irradiation
title_short	Highly Reliable Method to Obtain a Correlation Coefficient Unaffected by the SEM Noise Component for Examining the Degree of Specimen Damage due to Electron Beam Irradiation
title_full	Highly Reliable Method to Obtain a Correlation Coefficient Unaffected by the SEM Noise Component for Examining the Degree of Specimen Damage due to Electron Beam Irradiation
title_fullStr	Highly Reliable Method to Obtain a Correlation Coefficient Unaffected by the SEM Noise Component for Examining the Degree of Specimen Damage due to Electron Beam Irradiation
title_full_unstemmed	Highly Reliable Method to Obtain a Correlation Coefficient Unaffected by the SEM Noise Component for Examining the Degree of Specimen Damage due to Electron Beam Irradiation
title_sort	highly reliable method to obtain a correlation coefficient unaffected by the sem noise component for examining the degree of specimen damage due to electron beam irradiation
publisher	Hindawi-Wiley
publishDate	2021
url	https://doaj.org/article/9f6119a750244c8785e63f51a84ce436
work_keys_str_mv	AT eisakuoho highlyreliablemethodtoobtainacorrelationcoefficientunaffectedbythesemnoisecomponentforexaminingthedegreeofspecimendamageduetoelectronbeamirradiation AT kazuhikosuzuki highlyreliablemethodtoobtainacorrelationcoefficientunaffectedbythesemnoisecomponentforexaminingthedegreeofspecimendamageduetoelectronbeamirradiation AT sadaoyamazaki highlyreliablemethodtoobtainacorrelationcoefficientunaffectedbythesemnoisecomponentforexaminingthedegreeofspecimendamageduetoelectronbeamirradiation
_version_	1718407662766391296

Highly Reliable Method to Obtain a Correlation Coefficient Unaffected by the SEM Noise Component for Examining the Degree of Specimen Damage due to Electron Beam Irradiation

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