Structural Color Filters Enabled by a Dielectric Metasurface Incorporating Hydrogenated Amorphous Silicon Nanodisks

Abstract It is advantageous to construct a dielectric metasurface in silicon due to its compatibility with cost-effective, mature processes for complementary metal-oxide-semiconductor devices. However, high-quality crystalline-silicon films are difficult to grow on foreign substrates. In this work,...

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Autores principales: Chul-Soon Park, Vivek Raj Shrestha, Wenjing Yue, Song Gao, Sang-Shin Lee, Eun-Soo Kim, Duk-Yong Choi
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Publicado: Nature Portfolio 2017
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Acceso en línea:https://doaj.org/article/a2f91f0209514227b8b88463e858b47f
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spelling oai:doaj.org-article:a2f91f0209514227b8b88463e858b47f2021-12-02T15:05:13ZStructural Color Filters Enabled by a Dielectric Metasurface Incorporating Hydrogenated Amorphous Silicon Nanodisks10.1038/s41598-017-02911-w2045-2322https://doaj.org/article/a2f91f0209514227b8b88463e858b47f2017-05-01T00:00:00Zhttps://doi.org/10.1038/s41598-017-02911-whttps://doaj.org/toc/2045-2322Abstract It is advantageous to construct a dielectric metasurface in silicon due to its compatibility with cost-effective, mature processes for complementary metal-oxide-semiconductor devices. However, high-quality crystalline-silicon films are difficult to grow on foreign substrates. In this work, we propose and realize highly efficient structural color filters based on a dielectric metasurface exploiting hydrogenated amorphous silicon (a-Si:H), known to be lossy in the visible regime. The metasurface is comprised of an array of a-Si:H nanodisks embedded in a polymer, providing a homogeneously planarized surface that is crucial for practical applications. The a-Si:H nanodisk element is deemed to individually support an electric dipole (ED) and magnetic dipole (MD) resonance via Mie scattering, thereby leading to wavelength-dependent filtering characteristics. The ED and MD can be precisely identified by observing the resonant field profiles with the assistance of finite-difference time-domain simulations. The completed color filters provide a high transmission of around 90% in the off-resonance band longer than their resonant wavelengths, exhibiting vivid subtractive colors. A wide range of colors can be facilitated by tuning the resonance by adjusting the structural parameters like the period and diameter of the a-Si:H nanodisk. The proposed devices will be actively utilized to implement color displays, imaging devices, and photorealistic color printing.Chul-Soon ParkVivek Raj ShresthaWenjing YueSong GaoSang-Shin LeeEun-Soo KimDuk-Yong ChoiNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 7, Iss 1, Pp 1-9 (2017)
institution DOAJ
collection DOAJ
language EN
topic Medicine
R
Science
Q
spellingShingle Medicine
R
Science
Q
Chul-Soon Park
Vivek Raj Shrestha
Wenjing Yue
Song Gao
Sang-Shin Lee
Eun-Soo Kim
Duk-Yong Choi
Structural Color Filters Enabled by a Dielectric Metasurface Incorporating Hydrogenated Amorphous Silicon Nanodisks
description Abstract It is advantageous to construct a dielectric metasurface in silicon due to its compatibility with cost-effective, mature processes for complementary metal-oxide-semiconductor devices. However, high-quality crystalline-silicon films are difficult to grow on foreign substrates. In this work, we propose and realize highly efficient structural color filters based on a dielectric metasurface exploiting hydrogenated amorphous silicon (a-Si:H), known to be lossy in the visible regime. The metasurface is comprised of an array of a-Si:H nanodisks embedded in a polymer, providing a homogeneously planarized surface that is crucial for practical applications. The a-Si:H nanodisk element is deemed to individually support an electric dipole (ED) and magnetic dipole (MD) resonance via Mie scattering, thereby leading to wavelength-dependent filtering characteristics. The ED and MD can be precisely identified by observing the resonant field profiles with the assistance of finite-difference time-domain simulations. The completed color filters provide a high transmission of around 90% in the off-resonance band longer than their resonant wavelengths, exhibiting vivid subtractive colors. A wide range of colors can be facilitated by tuning the resonance by adjusting the structural parameters like the period and diameter of the a-Si:H nanodisk. The proposed devices will be actively utilized to implement color displays, imaging devices, and photorealistic color printing.
format article
author Chul-Soon Park
Vivek Raj Shrestha
Wenjing Yue
Song Gao
Sang-Shin Lee
Eun-Soo Kim
Duk-Yong Choi
author_facet Chul-Soon Park
Vivek Raj Shrestha
Wenjing Yue
Song Gao
Sang-Shin Lee
Eun-Soo Kim
Duk-Yong Choi
author_sort Chul-Soon Park
title Structural Color Filters Enabled by a Dielectric Metasurface Incorporating Hydrogenated Amorphous Silicon Nanodisks
title_short Structural Color Filters Enabled by a Dielectric Metasurface Incorporating Hydrogenated Amorphous Silicon Nanodisks
title_full Structural Color Filters Enabled by a Dielectric Metasurface Incorporating Hydrogenated Amorphous Silicon Nanodisks
title_fullStr Structural Color Filters Enabled by a Dielectric Metasurface Incorporating Hydrogenated Amorphous Silicon Nanodisks
title_full_unstemmed Structural Color Filters Enabled by a Dielectric Metasurface Incorporating Hydrogenated Amorphous Silicon Nanodisks
title_sort structural color filters enabled by a dielectric metasurface incorporating hydrogenated amorphous silicon nanodisks
publisher Nature Portfolio
publishDate 2017
url https://doaj.org/article/a2f91f0209514227b8b88463e858b47f
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