Development of Ellipsometric Microscope for High-Resolution Observation of Nanometer-Thick Lubricant Films

Real-time visualization of the nm-thick liquid lubricants is useful to clarify the lubrication phenomena using liquid thin films, for example, the lubrication for hard disk drives. In this paper, we present a method of measuing the film thickness using a vertical-objective-based ellipsometric micros...

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Autores principales: Liu Qingqing, Kenji Fukuzawa, Yosuke Kajihara, Hedong Zhang, Shintaro Itoh
Formato: article
Lenguaje:EN
Publicado: Japanese Society of Tribologists 2011
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Acceso en línea:https://doaj.org/article/a4b87a93f7904c26922530c975c2ac1c
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