Development of Ellipsometric Microscope for High-Resolution Observation of Nanometer-Thick Lubricant Films

Real-time visualization of the nm-thick liquid lubricants is useful to clarify the lubrication phenomena using liquid thin films, for example, the lubrication for hard disk drives. In this paper, we present a method of measuing the film thickness using a vertical-objective-based ellipsometric micros...

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Autores principales:	Liu Qingqing, Kenji Fukuzawa, Yosuke Kajihara, Hedong Zhang, Shintaro Itoh
Formato:	article
Lenguaje:	EN
Publicado:	Japanese Society of Tribologists 2011
Materias:	ellipsometry real-time visualization lubricant film thickness vertical-objective-based ellipsometric microscope lateral resolution Physics QC1-999 Engineering (General). Civil engineering (General) TA1-2040 Mechanical engineering and machinery TJ1-1570 Chemistry QD1-999
Acceso en línea:	https://doaj.org/article/a4b87a93f7904c26922530c975c2ac1c
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spelling	oai:doaj.org-article:a4b87a93f7904c26922530c975c2ac1c2021-11-05T09:25:36ZDevelopment of Ellipsometric Microscope for High-Resolution Observation of Nanometer-Thick Lubricant Films1881-219810.2474/trol.6.251https://doaj.org/article/a4b87a93f7904c26922530c975c2ac1c2011-08-01T00:00:00Zhttps://www.jstage.jst.go.jp/article/trol/6/6/6_6_251/_pdf/-char/enhttps://doaj.org/toc/1881-2198Real-time visualization of the nm-thick liquid lubricants is useful to clarify the lubrication phenomena using liquid thin films, for example, the lubrication for hard disk drives. In this paper, we present a method of measuing the film thickness using a vertical-objective-based ellipsometric microscope, which is a microscope based on ellipsometry that widely used for the investigation for thin films. In this method, the intensity signal can be directly converted to the thickness and the calibration can also be done by a phase shift method without any other devices. Sub-nm thickness and the sub-μm lateral resolutions were experimentally achieved for the visualization of the nm-thick lubricant films.Liu QingqingKenji FukuzawaYosuke KajiharaHedong ZhangShintaro ItohJapanese Society of Tribologistsarticleellipsometryreal-time visualizationlubricant film thicknessvertical-objective-based ellipsometric microscopelateral resolutionPhysicsQC1-999Engineering (General). Civil engineering (General)TA1-2040Mechanical engineering and machineryTJ1-1570ChemistryQD1-999ENTribology Online, Vol 6, Iss 6, Pp 251-256 (2011)
institution	DOAJ
collection	DOAJ
language	EN
topic	ellipsometry real-time visualization lubricant film thickness vertical-objective-based ellipsometric microscope lateral resolution Physics QC1-999 Engineering (General). Civil engineering (General) TA1-2040 Mechanical engineering and machinery TJ1-1570 Chemistry QD1-999
spellingShingle	ellipsometry real-time visualization lubricant film thickness vertical-objective-based ellipsometric microscope lateral resolution Physics QC1-999 Engineering (General). Civil engineering (General) TA1-2040 Mechanical engineering and machinery TJ1-1570 Chemistry QD1-999 Liu Qingqing Kenji Fukuzawa Yosuke Kajihara Hedong Zhang Shintaro Itoh Development of Ellipsometric Microscope for High-Resolution Observation of Nanometer-Thick Lubricant Films
description	Real-time visualization of the nm-thick liquid lubricants is useful to clarify the lubrication phenomena using liquid thin films, for example, the lubrication for hard disk drives. In this paper, we present a method of measuing the film thickness using a vertical-objective-based ellipsometric microscope, which is a microscope based on ellipsometry that widely used for the investigation for thin films. In this method, the intensity signal can be directly converted to the thickness and the calibration can also be done by a phase shift method without any other devices. Sub-nm thickness and the sub-μm lateral resolutions were experimentally achieved for the visualization of the nm-thick lubricant films.
format	article
author	Liu Qingqing Kenji Fukuzawa Yosuke Kajihara Hedong Zhang Shintaro Itoh
author_facet	Liu Qingqing Kenji Fukuzawa Yosuke Kajihara Hedong Zhang Shintaro Itoh
author_sort	Liu Qingqing
title	Development of Ellipsometric Microscope for High-Resolution Observation of Nanometer-Thick Lubricant Films
title_short	Development of Ellipsometric Microscope for High-Resolution Observation of Nanometer-Thick Lubricant Films
title_full	Development of Ellipsometric Microscope for High-Resolution Observation of Nanometer-Thick Lubricant Films
title_fullStr	Development of Ellipsometric Microscope for High-Resolution Observation of Nanometer-Thick Lubricant Films
title_full_unstemmed	Development of Ellipsometric Microscope for High-Resolution Observation of Nanometer-Thick Lubricant Films
title_sort	development of ellipsometric microscope for high-resolution observation of nanometer-thick lubricant films
publisher	Japanese Society of Tribologists
publishDate	2011
url	https://doaj.org/article/a4b87a93f7904c26922530c975c2ac1c
work_keys_str_mv	AT liuqingqing developmentofellipsometricmicroscopeforhighresolutionobservationofnanometerthicklubricantfilms AT kenjifukuzawa developmentofellipsometricmicroscopeforhighresolutionobservationofnanometerthicklubricantfilms AT yosukekajihara developmentofellipsometricmicroscopeforhighresolutionobservationofnanometerthicklubricantfilms AT hedongzhang developmentofellipsometricmicroscopeforhighresolutionobservationofnanometerthicklubricantfilms AT shintaroitoh developmentofellipsometricmicroscopeforhighresolutionobservationofnanometerthicklubricantfilms
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Development of Ellipsometric Microscope for High-Resolution Observation of Nanometer-Thick Lubricant Films

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