Development of Ellipsometric Microscope for High-Resolution Observation of Nanometer-Thick Lubricant Films
Real-time visualization of the nm-thick liquid lubricants is useful to clarify the lubrication phenomena using liquid thin films, for example, the lubrication for hard disk drives. In this paper, we present a method of measuing the film thickness using a vertical-objective-based ellipsometric micros...
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| Autores principales: | , , , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
Japanese Society of Tribologists
2011
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/a4b87a93f7904c26922530c975c2ac1c |
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