Development of Ellipsometric Microscope for High-Resolution Observation of Nanometer-Thick Lubricant Films
Real-time visualization of the nm-thick liquid lubricants is useful to clarify the lubrication phenomena using liquid thin films, for example, the lubrication for hard disk drives. In this paper, we present a method of measuing the film thickness using a vertical-objective-based ellipsometric micros...
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| Auteurs principaux: | , , , , |
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| Format: | article |
| Langue: | EN |
| Publié: |
Japanese Society of Tribologists
2011
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| Sujets: | |
| Accès en ligne: | https://doaj.org/article/a4b87a93f7904c26922530c975c2ac1c |
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