Pattern transfer of large-scale thin membranes with controllable self-delamination interface for integrated functional systems

Direct transfer of pre-patterned materials strongly benefits realisation of integrated functional systems over conventional fabrication process. Here, the authors demonstrate a self-delamination-driven pattern transfer of a single crystalline silicon thin membrane via well-controlled interfacial des...

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Autores principales:	Jun Kyu Park, Yue Zhang, Baoxing Xu, Seok Kim
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2021
Materias:	Science Q
Acceso en línea:	https://doaj.org/article/a825464efc364832921bdfcd085eab94
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spelling	oai:doaj.org-article:a825464efc364832921bdfcd085eab942021-11-28T12:31:12ZPattern transfer of large-scale thin membranes with controllable self-delamination interface for integrated functional systems10.1038/s41467-021-27208-52041-1723https://doaj.org/article/a825464efc364832921bdfcd085eab942021-11-01T00:00:00Zhttps://doi.org/10.1038/s41467-021-27208-5https://doaj.org/toc/2041-1723Direct transfer of pre-patterned materials strongly benefits realisation of integrated functional systems over conventional fabrication process. Here, the authors demonstrate a self-delamination-driven pattern transfer of a single crystalline silicon thin membrane via well-controlled interfacial design in a liquid media.Jun Kyu ParkYue ZhangBaoxing XuSeok KimNature PortfolioarticleScienceQENNature Communications, Vol 12, Iss 1, Pp 1-10 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Science Q
spellingShingle	Science Q Jun Kyu Park Yue Zhang Baoxing Xu Seok Kim Pattern transfer of large-scale thin membranes with controllable self-delamination interface for integrated functional systems
description	Direct transfer of pre-patterned materials strongly benefits realisation of integrated functional systems over conventional fabrication process. Here, the authors demonstrate a self-delamination-driven pattern transfer of a single crystalline silicon thin membrane via well-controlled interfacial design in a liquid media.
format	article
author	Jun Kyu Park Yue Zhang Baoxing Xu Seok Kim
author_facet	Jun Kyu Park Yue Zhang Baoxing Xu Seok Kim
author_sort	Jun Kyu Park
title	Pattern transfer of large-scale thin membranes with controllable self-delamination interface for integrated functional systems
title_short	Pattern transfer of large-scale thin membranes with controllable self-delamination interface for integrated functional systems
title_full	Pattern transfer of large-scale thin membranes with controllable self-delamination interface for integrated functional systems
title_fullStr	Pattern transfer of large-scale thin membranes with controllable self-delamination interface for integrated functional systems
title_full_unstemmed	Pattern transfer of large-scale thin membranes with controllable self-delamination interface for integrated functional systems
title_sort	pattern transfer of large-scale thin membranes with controllable self-delamination interface for integrated functional systems
publisher	Nature Portfolio
publishDate	2021
url	https://doaj.org/article/a825464efc364832921bdfcd085eab94
work_keys_str_mv	AT junkyupark patterntransferoflargescalethinmembraneswithcontrollableselfdelaminationinterfaceforintegratedfunctionalsystems AT yuezhang patterntransferoflargescalethinmembraneswithcontrollableselfdelaminationinterfaceforintegratedfunctionalsystems AT baoxingxu patterntransferoflargescalethinmembraneswithcontrollableselfdelaminationinterfaceforintegratedfunctionalsystems AT seokkim patterntransferoflargescalethinmembraneswithcontrollableselfdelaminationinterfaceforintegratedfunctionalsystems
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Pattern transfer of large-scale thin membranes with controllable self-delamination interface for integrated functional systems

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