Nitrogenation of Amorphous Silicon : Reactive Molecular Dynamics Simulations
Since silicon nitride (SiNx) film is more stable than SiO2, silicon nitride, thus it is widely used in semiconductor industry as an insulatorlayer. The study of nitrogenation process of a-Si was performed using molecular dynamics simulations to determine the properties of the bonds created in the st...
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| Main Authors: | , , , |
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| Format: | article |
| Language: | EN |
| Published: |
University of Brawijaya
2019
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| Subjects: | |
| Online Access: | https://doaj.org/article/aff25d28df684710aeac9ab2f7810d58 |
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