Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors

Abstract The development of the optical bio-chemical sensing technology is an extremely important scientific and technological issue for diagnosis and monitoring of diseases, control of industrial processes, environmental detection of air and water pollutants. Owing to their distinctive features, ch...

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Autores principales:	E. Baudet, M. Sergent, P. Němec, C. Cardinaud, E. Rinnert, K. Michel, L. Jouany, B. Bureau, V. Nazabal
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2017
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/b0c750d6e4c24261b88d358544db96e4
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spelling	oai:doaj.org-article:b0c750d6e4c24261b88d358544db96e42021-12-02T15:05:27ZExperimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors10.1038/s41598-017-03678-w2045-2322https://doaj.org/article/b0c750d6e4c24261b88d358544db96e42017-06-01T00:00:00Zhttps://doi.org/10.1038/s41598-017-03678-whttps://doaj.org/toc/2045-2322Abstract The development of the optical bio-chemical sensing technology is an extremely important scientific and technological issue for diagnosis and monitoring of diseases, control of industrial processes, environmental detection of air and water pollutants. Owing to their distinctive features, chalcogenide amorphous thin films represent a keystone in the manufacture of middle infrared integrated optical devices for a sensitive detection of biological or environmental variations. Since the chalcogenide thin films characteristics, i.e. stoichiometric conformity, structure, roughness or optical properties can be affected by the growth process, the choice and control of the deposition method is crucial. An approach based on the experimental design is undoubtedly a way to be explored allowing fast optimization of chalcogenide film deposition by means of radio frequency sputtering process. Argon (Ar) pressure, working power and deposition time were selected as potentially the most influential factors among all possible. The experimental design analysis confirms the great influence of the Ar pressure on studied responses: chemical composition, refractive index in near-IR (1.55 µm) and middle infrared (6.3 and 7.7 µm), band-gap energy, deposition rate and surface roughness. Depending on the intended application and therefore desired thin film characteristics, mappings of the experimental design meaningfully help to select suitable deposition parameters.E. BaudetM. SergentP. NěmecC. CardinaudE. RinnertK. MichelL. JouanyB. BureauV. NazabalNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 7, Iss 1, Pp 1-14 (2017)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q E. Baudet M. Sergent P. Němec C. Cardinaud E. Rinnert K. Michel L. Jouany B. Bureau V. Nazabal Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors
description	Abstract The development of the optical bio-chemical sensing technology is an extremely important scientific and technological issue for diagnosis and monitoring of diseases, control of industrial processes, environmental detection of air and water pollutants. Owing to their distinctive features, chalcogenide amorphous thin films represent a keystone in the manufacture of middle infrared integrated optical devices for a sensitive detection of biological or environmental variations. Since the chalcogenide thin films characteristics, i.e. stoichiometric conformity, structure, roughness or optical properties can be affected by the growth process, the choice and control of the deposition method is crucial. An approach based on the experimental design is undoubtedly a way to be explored allowing fast optimization of chalcogenide film deposition by means of radio frequency sputtering process. Argon (Ar) pressure, working power and deposition time were selected as potentially the most influential factors among all possible. The experimental design analysis confirms the great influence of the Ar pressure on studied responses: chemical composition, refractive index in near-IR (1.55 µm) and middle infrared (6.3 and 7.7 µm), band-gap energy, deposition rate and surface roughness. Depending on the intended application and therefore desired thin film characteristics, mappings of the experimental design meaningfully help to select suitable deposition parameters.
format	article
author	E. Baudet M. Sergent P. Němec C. Cardinaud E. Rinnert K. Michel L. Jouany B. Bureau V. Nazabal
author_facet	E. Baudet M. Sergent P. Němec C. Cardinaud E. Rinnert K. Michel L. Jouany B. Bureau V. Nazabal
author_sort	E. Baudet
title	Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors
title_short	Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors
title_full	Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors
title_fullStr	Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors
title_full_unstemmed	Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors
title_sort	experimental design approach for deposition optimization of rf sputtered chalcogenide thin films devoted to environmental optical sensors
publisher	Nature Portfolio
publishDate	2017
url	https://doaj.org/article/b0c750d6e4c24261b88d358544db96e4
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Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors

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