Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors

Abstract The development of the optical bio-chemical sensing technology is an extremely important scientific and technological issue for diagnosis and monitoring of diseases, control of industrial processes, environmental detection of air and water pollutants. Owing to their distinctive features, ch...

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Autores principales: E. Baudet, M. Sergent, P. Němec, C. Cardinaud, E. Rinnert, K. Michel, L. Jouany, B. Bureau, V. Nazabal
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2017
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Acceso en línea:https://doaj.org/article/b0c750d6e4c24261b88d358544db96e4
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