Single crystal functional oxides on silicon

Single crystal functional oxides on silicon

Synthesis of single-crystal complex-oxide films directly on silicon is difficult due to differing interfacial chemistry. Here, the authors demonstrate room-temperature integration of single-crystal lead zirconate titanate on to silicon to act as a gate insulator in a field-effect transistor.

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Auteurs principaux: Saidur Rahman Bakaul, Claudy Rayan Serrao, Michelle Lee, Chun Wing Yeung, Asis Sarker, Shang-Lin Hsu, Ajay Kumar Yadav, Liv Dedon, Long You, Asif Islam Khan, James David Clarkson, Chenming Hu, Ramamoorthy Ramesh, Sayeef Salahuddin
Format: article
Langue:EN
Publié: Nature Portfolio 2016
Sujets:
Science
Q
Accès en ligne:https://doaj.org/article/b0e855facabb4c98bf0d6af5e7692a8d
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Internet

https://doaj.org/article/b0e855facabb4c98bf0d6af5e7692a8d

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