Highly stacked 3D organic integrated circuits with via-hole-less multilevel metal interconnects

Though large-scale integration of organic transistors into integrated circuits via 3D stacking is a promising approach, reliable methods of device fabrication are still needed. Here, the authors report a metal interconnect scheme for reliable fabrication of 3D integrated organic transistor circuits.

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Autores principales: Hocheon Yoo, Hongkeun Park, Seunghyun Yoo, Sungmin On, Hyejeong Seong, Sung Gap Im, Jae-Joon Kim
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2019
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Acceso en línea:https://doaj.org/article/b290b85f242a427e9347b3b9aa9fbd52
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spelling oai:doaj.org-article:b290b85f242a427e9347b3b9aa9fbd522021-12-02T17:32:24ZHighly stacked 3D organic integrated circuits with via-hole-less multilevel metal interconnects10.1038/s41467-019-10412-92041-1723https://doaj.org/article/b290b85f242a427e9347b3b9aa9fbd522019-06-01T00:00:00Zhttps://doi.org/10.1038/s41467-019-10412-9https://doaj.org/toc/2041-1723Though large-scale integration of organic transistors into integrated circuits via 3D stacking is a promising approach, reliable methods of device fabrication are still needed. Here, the authors report a metal interconnect scheme for reliable fabrication of 3D integrated organic transistor circuits.Hocheon YooHongkeun ParkSeunghyun YooSungmin OnHyejeong SeongSung Gap ImJae-Joon KimNature PortfolioarticleScienceQENNature Communications, Vol 10, Iss 1, Pp 1-9 (2019)
institution DOAJ
collection DOAJ
language EN
topic Science
Q
spellingShingle Science
Q
Hocheon Yoo
Hongkeun Park
Seunghyun Yoo
Sungmin On
Hyejeong Seong
Sung Gap Im
Jae-Joon Kim
Highly stacked 3D organic integrated circuits with via-hole-less multilevel metal interconnects
description Though large-scale integration of organic transistors into integrated circuits via 3D stacking is a promising approach, reliable methods of device fabrication are still needed. Here, the authors report a metal interconnect scheme for reliable fabrication of 3D integrated organic transistor circuits.
format article
author Hocheon Yoo
Hongkeun Park
Seunghyun Yoo
Sungmin On
Hyejeong Seong
Sung Gap Im
Jae-Joon Kim
author_facet Hocheon Yoo
Hongkeun Park
Seunghyun Yoo
Sungmin On
Hyejeong Seong
Sung Gap Im
Jae-Joon Kim
author_sort Hocheon Yoo
title Highly stacked 3D organic integrated circuits with via-hole-less multilevel metal interconnects
title_short Highly stacked 3D organic integrated circuits with via-hole-less multilevel metal interconnects
title_full Highly stacked 3D organic integrated circuits with via-hole-less multilevel metal interconnects
title_fullStr Highly stacked 3D organic integrated circuits with via-hole-less multilevel metal interconnects
title_full_unstemmed Highly stacked 3D organic integrated circuits with via-hole-less multilevel metal interconnects
title_sort highly stacked 3d organic integrated circuits with via-hole-less multilevel metal interconnects
publisher Nature Portfolio
publishDate 2019
url https://doaj.org/article/b290b85f242a427e9347b3b9aa9fbd52
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AT sungminon highlystacked3dorganicintegratedcircuitswithviaholelessmultilevelmetalinterconnects
AT hyejeongseong highlystacked3dorganicintegratedcircuitswithviaholelessmultilevelmetalinterconnects
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