Highly stacked 3D organic integrated circuits with via-hole-less multilevel metal interconnects
Though large-scale integration of organic transistors into integrated circuits via 3D stacking is a promising approach, reliable methods of device fabrication are still needed. Here, the authors report a metal interconnect scheme for reliable fabrication of 3D integrated organic transistor circuits.
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Nature Portfolio
2019
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oai:doaj.org-article:b290b85f242a427e9347b3b9aa9fbd522021-12-02T17:32:24ZHighly stacked 3D organic integrated circuits with via-hole-less multilevel metal interconnects10.1038/s41467-019-10412-92041-1723https://doaj.org/article/b290b85f242a427e9347b3b9aa9fbd522019-06-01T00:00:00Zhttps://doi.org/10.1038/s41467-019-10412-9https://doaj.org/toc/2041-1723Though large-scale integration of organic transistors into integrated circuits via 3D stacking is a promising approach, reliable methods of device fabrication are still needed. Here, the authors report a metal interconnect scheme for reliable fabrication of 3D integrated organic transistor circuits.Hocheon YooHongkeun ParkSeunghyun YooSungmin OnHyejeong SeongSung Gap ImJae-Joon KimNature PortfolioarticleScienceQENNature Communications, Vol 10, Iss 1, Pp 1-9 (2019) |
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Science Q Hocheon Yoo Hongkeun Park Seunghyun Yoo Sungmin On Hyejeong Seong Sung Gap Im Jae-Joon Kim Highly stacked 3D organic integrated circuits with via-hole-less multilevel metal interconnects |
description |
Though large-scale integration of organic transistors into integrated circuits via 3D stacking is a promising approach, reliable methods of device fabrication are still needed. Here, the authors report a metal interconnect scheme for reliable fabrication of 3D integrated organic transistor circuits. |
format |
article |
author |
Hocheon Yoo Hongkeun Park Seunghyun Yoo Sungmin On Hyejeong Seong Sung Gap Im Jae-Joon Kim |
author_facet |
Hocheon Yoo Hongkeun Park Seunghyun Yoo Sungmin On Hyejeong Seong Sung Gap Im Jae-Joon Kim |
author_sort |
Hocheon Yoo |
title |
Highly stacked 3D organic integrated circuits with via-hole-less multilevel metal interconnects |
title_short |
Highly stacked 3D organic integrated circuits with via-hole-less multilevel metal interconnects |
title_full |
Highly stacked 3D organic integrated circuits with via-hole-less multilevel metal interconnects |
title_fullStr |
Highly stacked 3D organic integrated circuits with via-hole-less multilevel metal interconnects |
title_full_unstemmed |
Highly stacked 3D organic integrated circuits with via-hole-less multilevel metal interconnects |
title_sort |
highly stacked 3d organic integrated circuits with via-hole-less multilevel metal interconnects |
publisher |
Nature Portfolio |
publishDate |
2019 |
url |
https://doaj.org/article/b290b85f242a427e9347b3b9aa9fbd52 |
work_keys_str_mv |
AT hocheonyoo highlystacked3dorganicintegratedcircuitswithviaholelessmultilevelmetalinterconnects AT hongkeunpark highlystacked3dorganicintegratedcircuitswithviaholelessmultilevelmetalinterconnects AT seunghyunyoo highlystacked3dorganicintegratedcircuitswithviaholelessmultilevelmetalinterconnects AT sungminon highlystacked3dorganicintegratedcircuitswithviaholelessmultilevelmetalinterconnects AT hyejeongseong highlystacked3dorganicintegratedcircuitswithviaholelessmultilevelmetalinterconnects AT sunggapim highlystacked3dorganicintegratedcircuitswithviaholelessmultilevelmetalinterconnects AT jaejoonkim highlystacked3dorganicintegratedcircuitswithviaholelessmultilevelmetalinterconnects |
_version_ |
1718380329397387264 |