Electrical contact resistance performance of precious-metal-electroplated carbon nanotube films under micro loads
Radio frequency-microelectromechanical system (RF-MEMS) switches, which use physical Ohmic contacts, are recently focused for high performance in the high-frequency ranges. Typically, the contact areas of the electrodes in RF-MEMS switches are less than 0.01 mm2, and they generate just very low norm...
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| Auteurs principaux: | , , , |
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| Format: | article |
| Langue: | EN |
| Publié: |
The Japan Society of Mechanical Engineers
2016
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| Accès en ligne: | https://doaj.org/article/b2e1e7982cc0458dacf25255834409a0 |
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