Electrical contact resistance performance of precious-metal-electroplated carbon nanotube films under micro loads

Radio frequency-microelectromechanical system (RF-MEMS) switches, which use physical Ohmic contacts, are recently focused for high performance in the high-frequency ranges. Typically, the contact areas of the electrodes in RF-MEMS switches are less than 0.01 mm2, and they generate just very low norm...

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Autores principales: Yusuke YUKIYOSHI, Yuma YOKOI, Hiroshi KINOSHITA, Masahiro FUJII
Formato: article
Lenguaje:EN
Publicado: The Japan Society of Mechanical Engineers 2016
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Acceso en línea:https://doaj.org/article/b2e1e7982cc0458dacf25255834409a0
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