Wideband MOEMS for the Calibration of Optical Readout Systems

The paper proposes a technology based on UV-LIGA process for microoptoelectromechanical systems (MOEMS) manufacturing. We used the original combination of materials and technological steps, in which any of the materials does not enter chemical reactions with each other, while all of them are weakly...

Descripción completa

Guardado en:
Detalles Bibliográficos
Autores principales: Petr Volkov, Andrey Lukyanov, Alexander Goryunov, Daniil Semikov, Evgeniy Vopilkin, Stanislav Kraev, Andrey Okhapkin, Anatoly Tertyshnik, Ekaterina Arkhipova
Formato: article
Lenguaje:EN
Publicado: MDPI AG 2021
Materias:
Acceso en línea:https://doaj.org/article/b3b0551f289f4ce7a228007b6375662a
Etiquetas: Agregar Etiqueta
Sin Etiquetas, Sea el primero en etiquetar este registro!