Wideband MOEMS for the Calibration of Optical Readout Systems

The paper proposes a technology based on UV-LIGA process for microoptoelectromechanical systems (MOEMS) manufacturing. We used the original combination of materials and technological steps, in which any of the materials does not enter chemical reactions with each other, while all of them are weakly...

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Autores principales:	Petr Volkov, Andrey Lukyanov, Alexander Goryunov, Daniil Semikov, Evgeniy Vopilkin, Stanislav Kraev, Andrey Okhapkin, Anatoly Tertyshnik, Ekaterina Arkhipova
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	optics fiber-optic sensors UV-LIGA MOEMS Chemical technology TP1-1185
Acceso en línea:	https://doaj.org/article/b3b0551f289f4ce7a228007b6375662a
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spelling	oai:doaj.org-article:b3b0551f289f4ce7a228007b6375662a2021-11-11T19:17:07ZWideband MOEMS for the Calibration of Optical Readout Systems10.3390/s212173431424-8220https://doaj.org/article/b3b0551f289f4ce7a228007b6375662a2021-11-01T00:00:00Zhttps://www.mdpi.com/1424-8220/21/21/7343https://doaj.org/toc/1424-8220The paper proposes a technology based on UV-LIGA process for microoptoelectromechanical systems (MOEMS) manufacturing. We used the original combination of materials and technological steps, in which any of the materials does not enter chemical reactions with each other, while all of them are weakly sensitive to the effects of oxygen plasma. This made it suitable for long-term etching in the oxygen plasma at low discharge power with the complete preservation of the original geometry, including small parts. The micromembranes were formed by thermal evaporation of Al. This simplified the technique compared to the classic UV-LIGA and guaranteed high quality and uniformity of the resulting structure. To demonstrate the complete process, a test MOEMS with electrostatic control was manufactured. On one chip, a set of micromembranes was created with different stiffness from 10 nm/V to 100 nm/V and various working ranges from 100 to 300 nm. All membranes have a flat frequency response without resonant peaks in the frequency range 0–200 kHz. The proposed technology potentially enables the manufacture of wide low-height membranes of complex geometry to create microoptic fiber sensors.Petr VolkovAndrey LukyanovAlexander GoryunovDaniil SemikovEvgeniy VopilkinStanislav KraevAndrey OkhapkinAnatoly TertyshnikEkaterina ArkhipovaMDPI AGarticleopticsfiber-optic sensorsUV-LIGAMOEMSChemical technologyTP1-1185ENSensors, Vol 21, Iss 7343, p 7343 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	optics fiber-optic sensors UV-LIGA MOEMS Chemical technology TP1-1185
spellingShingle	optics fiber-optic sensors UV-LIGA MOEMS Chemical technology TP1-1185 Petr Volkov Andrey Lukyanov Alexander Goryunov Daniil Semikov Evgeniy Vopilkin Stanislav Kraev Andrey Okhapkin Anatoly Tertyshnik Ekaterina Arkhipova Wideband MOEMS for the Calibration of Optical Readout Systems
description	The paper proposes a technology based on UV-LIGA process for microoptoelectromechanical systems (MOEMS) manufacturing. We used the original combination of materials and technological steps, in which any of the materials does not enter chemical reactions with each other, while all of them are weakly sensitive to the effects of oxygen plasma. This made it suitable for long-term etching in the oxygen plasma at low discharge power with the complete preservation of the original geometry, including small parts. The micromembranes were formed by thermal evaporation of Al. This simplified the technique compared to the classic UV-LIGA and guaranteed high quality and uniformity of the resulting structure. To demonstrate the complete process, a test MOEMS with electrostatic control was manufactured. On one chip, a set of micromembranes was created with different stiffness from 10 nm/V to 100 nm/V and various working ranges from 100 to 300 nm. All membranes have a flat frequency response without resonant peaks in the frequency range 0–200 kHz. The proposed technology potentially enables the manufacture of wide low-height membranes of complex geometry to create microoptic fiber sensors.
format	article
author	Petr Volkov Andrey Lukyanov Alexander Goryunov Daniil Semikov Evgeniy Vopilkin Stanislav Kraev Andrey Okhapkin Anatoly Tertyshnik Ekaterina Arkhipova
author_facet	Petr Volkov Andrey Lukyanov Alexander Goryunov Daniil Semikov Evgeniy Vopilkin Stanislav Kraev Andrey Okhapkin Anatoly Tertyshnik Ekaterina Arkhipova
author_sort	Petr Volkov
title	Wideband MOEMS for the Calibration of Optical Readout Systems
title_short	Wideband MOEMS for the Calibration of Optical Readout Systems
title_full	Wideband MOEMS for the Calibration of Optical Readout Systems
title_fullStr	Wideband MOEMS for the Calibration of Optical Readout Systems
title_full_unstemmed	Wideband MOEMS for the Calibration of Optical Readout Systems
title_sort	wideband moems for the calibration of optical readout systems
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/b3b0551f289f4ce7a228007b6375662a
work_keys_str_mv	AT petrvolkov widebandmoemsforthecalibrationofopticalreadoutsystems AT andreylukyanov widebandmoemsforthecalibrationofopticalreadoutsystems AT alexandergoryunov widebandmoemsforthecalibrationofopticalreadoutsystems AT daniilsemikov widebandmoemsforthecalibrationofopticalreadoutsystems AT evgeniyvopilkin widebandmoemsforthecalibrationofopticalreadoutsystems AT stanislavkraev widebandmoemsforthecalibrationofopticalreadoutsystems AT andreyokhapkin widebandmoemsforthecalibrationofopticalreadoutsystems AT anatolytertyshnik widebandmoemsforthecalibrationofopticalreadoutsystems AT ekaterinaarkhipova widebandmoemsforthecalibrationofopticalreadoutsystems
_version_	1718431605716942848

Wideband MOEMS for the Calibration of Optical Readout Systems

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