Hierarchical microstructures with high spatial frequency laser induced periodic surface structures possessing different orientations created by femtosecond laser ablation of silicon in liquids
High spatial frequency laser induced periodic surface structures (HSFLs) on silicon substrates are often developed on flat surfaces at low fluences near ablation threshold of 0.1 J/cm2, seldom on microstructures or microgrooves at relatively higher fluences above 1 J/cm2. This work aims to enrich th...
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Formato: | article |
Lenguaje: | EN |
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Institue of Optics and Electronics, Chinese Academy of Sciences
2019
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Acceso en línea: | https://doaj.org/article/b8780bb79d464640926c1544a6d177e6 |
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