Surface Patterning of Closed Nanochannel Using VUV Light and Surface Evaluation by Streaming Current

In nanofluidics, surface control is a critical technology because nanospaces are surface-governed spaces as a consequence of their extremely high surface-to-volume ratio. Various surface patterning methods have been developed, including patterning on an open substrate and patterning using a liquid m...

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Bibliographic Details
Main Authors: Kyojiro Morikawa, Haruki Kazumi, Yoshiyuki Tsuyama, Ryoichi Ohta, Takehiko Kitamori
Format: article
Language:EN
Published: MDPI AG 2021
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Online Access:https://doaj.org/article/bd57f9f3e99042dca66f424fccd7d9dc
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