Realization of wafer-scale nanogratings with sub-50 nm period through vacancy epitaxy
Fabrication of wafer-scale nanogratings for X-ray spectroscopy is difficult especially for very high line densities. The authors use vacancy epitaxy to fabricate sub-50-nm-periodicity gratings, coated with multilayers for efficient operation, for use in ultra-high resolution x-ray spectroscopy.
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Auteurs principaux: | Qiushi Huang, Qi jia, Jiangtao Feng, Hao Huang, Xiaowei Yang, Joerg Grenzer, Kai Huang, Shibing Zhang, Jiajie Lin, Hongyan Zhou, Tiangui You, Wenjie Yu, Stefan Facsko, Philippe Jonnard, Meiyi Wu, Angelo Giglia, Zhong Zhang, Zhi Liu, Zhanshan Wang, Xi Wang, Xin Ou |
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Format: | article |
Langue: | EN |
Publié: |
Nature Portfolio
2019
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Sujets: | |
Accès en ligne: | https://doaj.org/article/c20da6ae27a34cc888da2e6b0ffc3180 |
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