Fabrication of three-dimensional suspended, interlayered and hierarchical nanostructures by accuracy-improved electron beam lithography overlay

Abstract Nanofabrication techniques are essential for exploring nanoscience and many closely related research fields such as materials, electronics, optics and photonics. Recently, three-dimensional (3D) nanofabrication techniques have been actively investigated through many different ways, however,...

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Auteurs principaux: Gwanho Yoon, Inki Kim, Sunae So, Jungho Mun, Minkyung Kim, Junsuk Rho
Format: article
Langue:EN
Publié: Nature Portfolio 2017
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Accès en ligne:https://doaj.org/article/c8cd1f6ff1984c20985d4e7e2b56473b
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