Interfacial Regulation of Dielectric Properties in Ferroelectric Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Thin Films

QR Code

Interfacial Regulation of Dielectric Properties in Ferroelectric Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Thin Films

The discovery of ferroelectricity in hafnium zirconium oxide (HZO) thin films has attracted wide attention from academia to industry due to the application in ferroelectric non-volatile random access memories (FeRAM) with prominent performance in scalability and CMOS process compatibility. Dielectri...

Full description

Saved in:

Bibliographic Details
Main Authors:	Minghao Shao, Tianqi Lu, Zhibo Wang, Houfang Liu, Ruiting Zhao, Xiao Liu, Xiaoyue Zhao, Renrong Liang, Yi Yang, Tian-Ling Ren
Format:	article
Language:	EN
Published:	IEEE 2021
Subjects:	Ferroelectrics hafnium zirconium oxide interface dielectric spectrum constant phase element Electrical engineering. Electronics. Nuclear engineering TK1-9971
Online Access:	https://doaj.org/article/c9a91c6aefa14025aaadbb374b0c9f07
Tags:	Add Tag No Tags, Be the first to tag this record!

Similar Items

Ferroelectrics Based on HfO<sub>2</sub> Film
by: Chong-Myeong Song, et al.
Published: (2021)

Structure and Dielectric Behavior of Yb<sub>2</sub>O<sub>3</sub>-MgO Co-Doped 0.92BaTiO<sub>3</sub>-0.08(Na<sub>0.5</sub>Bi<sub>0.5</sub>)TiO<sub>3</sub> Ferroelectric Relaxor
by: Xiao-Hu Ren, et al.
Published: (2021)

Improved Non-Piezoelectric Electric Properties Based on La Modulated Ferroelectric-Ergodic Relaxor Transition in (Bi<sub>0.5</sub>Na<sub>0.5</sub>)TiO<sub>3</sub>-Ba(Ti, Zr)O<sub>3</sub> Ceramics
by: Xingru Zhang, et al.
Published: (2021)

Band Gap of Pb(Fe<sub>0.5</sub>Nb<sub>0.5</sub>)O<sub>3</sub> Thin Films Prepared by Pulsed Laser Deposition
by: Nicole Bartek, et al.
Published: (2021)

The Effect of PVA Binder Solvent Composition on the Microstructure and Electrical Properties of 0.98BaTiO<sub>3</sub>-0.02(Ba<sub>0.5</sub>Ca<sub>0.5</sub>)SiO<sub>3</sub> Doped with Dy<sub>2</sub>O<sub>3</sub>
by: Nak-Beom Jo, et al.
Published: (2021)

Flexible Lead-Free Ba<sub>0.5</sub>Sr<sub>0.5</sub>TiO<sub>3</sub>/0.4BiFeO<sub>3</sub>-0.6SrTiO<sub>3</sub> Dielectric Film Capacitor with High Energy Storage Performance
by: Wenwen Wang, et al.
Published: (2021)

Origins of Giant Dielectric Properties with Low Loss Tangent in Rutile (Mg<sub>1/3</sub>Ta<sub>2/3</sub>)<sub>0.01</sub>Ti<sub>0.99</sub>O<sub>2</sub> Ceramic
by: Nateeporn Thongyong, et al.
Published: (2021)

Interfacial Dipole Modulation Device With SiO<sub>X</sub> Switching Species
by: Giuk Kim, et al.
Published: (2021)

Highly Conducting Li(Fe<sub>1−<i>x</i></sub>Mn<sub><i>x</i></sub>)<sub>0.88</sub>V<sub>0.08</sub>PO<sub>4</sub> Cathode Materials Nanocrystallized from the Glassy State (<i>x</i> = 0.25, 0.5, 0.75)
by: Justyna E. Frąckiewicz, et al.
Published: (2021)

Effect of Al Content on Phase Compositions of FeNiCoCrMo<sub>0.5</sub>Al<i><sub>x</sub></i> High Entropy Alloy
by: Anton Semikolenov, et al.
Published: (2021)

One-Pot Synthesis of Ni<sub>0.05</sub>Ce<sub>0.95</sub>O<sub>2−δ</sub> Catalysts with Nanocubes and Nanorods Morphology for CO<sub>2</sub> Methanation Reaction and in Operando DRIFT Analysis of Intermediate Species
by: Igor Luisetto, et al.
Published: (2021)

Ionic Porous Aromatic Framework as a Self-Degraded Template for the Synthesis of a Magnetic γ-Fe<sub>2</sub>O<sub>3</sub>/WO<sub>3</sub>·0.5H<sub>2</sub>O Hybrid Nanostructure with Enhanced Photocatalytic Property
by: Man Xu, et al.
Published: (2021)

Influence of TiO<sub>2</sub> and ZrO<sub>2</sub> Nanoparticles on Adhesive Bond Strength and Viscosity of Dentin Polymer: A Physical and Chemical Evaluation
by: Samar Al-Saleh, et al.
Published: (2021)

Effects of Non-Stoichiometry on the Ground State of the Frustrated System Li<sub>0.8</sub>Ni<sub>0.6</sub>Sb<sub>0.4</sub>O<sub>2</sub>
by: Evgeniya Vavilova, et al.
Published: (2021)

Al<sub>0.5</sub>CoCrFeNi<sub>2</sub> High Entropy Alloy Particle Reinforced AZ91 Magnesium Alloy-Based Composite Processed by Spark Plasma Sintering
by: Chun Chiu, et al.
Published: (2021)

Core-Shell Sr<sub>2</sub>CeO<sub>4</sub>@SiO<sub>2</sub> Filled COC-Based Composites with Low Dielectric Loss for High-Frequency Substrates
by: Qinlong Wang, et al.
Published: (2021)

Planarized Trench Isolation of In<sub>0.52</sub>Al<sub>0.48</sub>As/In<sub>0.8</sub>Ga<sub>0.2</sub>As Metamorphic High-Electron-Mobility Transistor by Liquid Phase Chemical Enhanced Oxidation
by: Houng-Wei Chen, et al.
Published: (2021)

Possible Evidence for Berezinskii–Kosterlitz–Thouless Transition in Ba(Fe<sub>0.914</sub>Co<sub>0.086</sub>)<sub>2</sub>As<sub>2</sub> Crystals
by: Wen-He Jiao, et al.
Published: (2021)

Enhancement of Catalytic Activity and Stability of La<sub>0.6</sub>Ca<sub>0.4</sub>Fe<sub>0.7</sub>Ni<sub>0.3</sub>O<sub>2.9</sub> Perovskite with ppm Concentration of Fe in the Electrolyte for the Oxygen Evolution Reaction
by: Sergei V. Porokhin, et al.
Published: (2021)

Exploring the Effect of a MnO<sub>2</sub> Coating on the Electrochemical Performance of a Li<sub>1.2</sub>Mn<sub>0.54</sub>Ni<sub>0.13</sub>Co<sub>0.13</sub>O<sub>2</sub> Cathode Material
by: Zhong Li, et al.
Published: (2021)

Electrochemical Performance of Thick-Film Li(Ni<sub>0.6</sub>Mn<sub>0.2</sub>Co<sub>0.2</sub>)O<sub>2</sub> Cathode with Hierarchic Structures and Laser Ablation
by: Zelai Song, et al.
Published: (2021)

EFFECTS OF THE SINTERIZATION PROCESS AND THE INFLUENCE OF THE LANTHANUM CONTENT IN THE Sr0.3-3Y/2LaYBa 0.7Nb2O5CERAMIC SYSTEM
by: GUERRERO,FIDEL, et al.
Published: (2000)

Determination of Spinel Content in Cycled Li<sub>1.2</sub>Ni<sub>0.13</sub>Mn<sub>0.54</sub>Co<sub>0.13</sub>O<sub>2</sub> Using Three-Dimensional Electron Diffraction and Precession Electron Diffraction
by: Matthias Quintelier, et al.
Published: (2021)

Electrochemical Investigations of BaCe<sub>0.7-x</sub>Sm<sub>x</sub>Zr<sub>0.2</sub>Y<sub>0.1</sub>O<sub>3-δ</sub> Sintered at a Low Sintering Temperature as a Perovskite Electrolyte for IT-SOFCs
by: Muneeb Irshad, et al.
Published: (2021)

Impact of Design on the Activity of ZrO<sub>2</sub> Catalysts in Cellulose Hydrolysis-Dehydration to Glucose and 5-Hydroxymethylfurfural
by: Tatiana B. Medvedeva, et al.
Published: (2021)

Phase Transformations from Nanocrystalline to Amorphous (Zr<sub>70</sub>Ni<sub>25</sub>Al<sub>5</sub>)<sub>100-x</sub>W<sub>x</sub> (x; 0, 2, 10, 20, 35 at. %) and Subsequent Consolidation
by: M. Sherif El-Eskandarany, et al.
Published: (2021)

BaF(<i>p</i>-BDC)<sub>0.5</sub> as the Catalyst Precursor for the Catalytic Dehydrochlorination of 1-Chloro-1,1-Difluoroethane to Vinylidene Fluoride
by: Shucheng Wang, et al.
Published: (2021)

The Study on the Active Site Regulated RuO<sub>x</sub>/Sn<sub>0.2</sub>Ti<sub>0.8</sub>O<sub>2</sub> Catalysts with Different Ru Precursors for the Catalytic Oxidation of Dichloromethane
by: Yang Yang, et al.
Published: (2021)

Surface Structure and Electronic Properties of Lu<sub>3</sub>Al<sub>5</sub>O<sub>12</sub>
by: Weian Guo, et al.
Published: (2021)

Effect of HfO<sub>2</sub>-Based Multi-Dielectrics on Electrical Properties of Amorphous In-Ga-Zn-O Thin Film Transistors
by: Ruozheng Wang, et al.
Published: (2021)

Preparation of Eu<sub>0.075</sub>Tb<sub>0.925</sub>-Metal Organic Framework as a Fluorescent Probe and Application in the Detection of Fe<sup>3+</sup> and Cr<sub>2</sub>O<sub>7</sub><sup>2−</sup>
by: Jie Yin, et al.
Published: (2021)

Interaction of Long Time Pulses of an Nd<sup>3+</sup>:YAG Laser Beam with the Heusler AlloyNi<sub>45</sub>Co<sub>5</sub>Mn<sub>35.5</sub>In<sub>14.5</sub>
by: Patryk Ciupak, et al.
Published: (2021)

Impact of the Stacking Order of HfO<sub><italic>x</italic></sub> and AlO<sub><italic>x</italic></sub> Dielectric Films on RRAM Switching Mechanisms to Behave Digital Resistive Switching and Synaptic Characteristics
by: Kai-Chi Chuang, et al.
Published: (2019)

Effects of Sub-Micro Sized BaTiO<sub>3</sub> Blocking Particles and Ag-Deposited Nano-Sized BaTiO<sub>3</sub> Hybrid Particles on Dielectric Properties of Poly(vinylidene-fluoride) Polymer
by: Kanyapak Silakaew, et al.
Published: (2021)

Crystal Structure Refinements of the Lead(II) Oxoarsenates(V) Pb<sub>2</sub>As<sub>2</sub>O<sub>7</sub>, Pb(H<sub>2</sub>AsO<sub>4</sub>)<sub>2</sub>, Pb<sub>5</sub>(AsO<sub>4</sub>)<sub>3</sub>OH and NaPb<sub>4</sub>(AsO<sub>4</sub>)<sub>3</sub> from Single-Crystal X-ray Data
by: Matthias Weil
Published: (2021)

In Situ Synthesis of β-Na<sub>1</sub>.<sub>5</sub>Y<sub>1</sub>.<sub>5</sub>F<sub>6</sub>: Er<sup>3+</sup> Crystals in Oxyfluoride Silicate Glass for Temperature Sensors and Their Spectral Conversion and Optical Thermometry Analysis
by: Rajesh Dagupati, et al.
Published: (2021)

Bidirectional Non-Filamentary RRAM as an Analog Neuromorphic Synapse, Part I: Al/Mo/Pr<sub>0.7</sub>Ca<sub>0.3</sub>MnO<sub>3</sub> Material Improvements and Device Measurements
by: Kibong Moon, et al.
Published: (2018)

Investigating the Nucleation of AlO<sub>x</sub> and HfO<sub>x</sub> ALD on Polyimide: Influence of Plasma Activation
by: Laura Astoreca, et al.
Published: (2021)

Neutron Diffraction Study of the Martensitic Transformation of Ni<sub>2.07</sub>Mn<sub>0.93</sub>Ga Heusler Alloy
by: Lara Righi
Published: (2021)

The Effect of Foliar Application of K<sub>2</sub>SO<sub>4</sub> or KH<sub>2</sub>PO<sub>4</sub> on Skin Color of the ‘Kyoho’ Grape
by: Linnan Wu, et al.
Published: (2021)