Loss in discharging atoms through artificial hole for fabricating metallic micro/nanowire by electromigration
The electromigration (EM) technique is a method that is used to ensure the physical growth of metallic micro/nanowires. In the EM technique, the atomic diffusion of metals is intentionally accelerated by controlling the input current and heating the substrate, thus forming a hillock owing to the acc...
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| Format: | article |
| Langue: | EN |
| Publié: |
The Japan Society of Mechanical Engineers
2019
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| Accès en ligne: | https://doaj.org/article/cac580521cad475d80f84640fa39acb0 |
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