Novel Passivation Approach of InAs/GaSb Superlattice for Mid-Short Wavelength Dual-Color Infrared Detector

For higher surface state density of InAs/GaSb type II superlattice materials, it is easy to form conductive oxide layer on the material surface. The first problem to be solved is passivation in the process of preparing infrared devices with InAs/GaSb superlattice materials. Passivation effect and co...

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Autor principal:	Zhang Lixue, Lu Xing, Zhu Xubo, Yao Guansheng
Formato:	article
Lenguaje:	ZH
Publicado:	Editorial Office of Aero Weaponry 2021
Materias:	\|inas/gasb superlattice\|mbe\|passivation\|dual-color infrared detector\|anodic fluorination Motor vehicles. Aeronautics. Astronautics TL1-4050
Acceso en línea:	https://doaj.org/article/cb1cf2a5abc64872a81fee03f596facd
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spelling	oai:doaj.org-article:cb1cf2a5abc64872a81fee03f596facd2021-11-30T00:13:23ZNovel Passivation Approach of InAs/GaSb Superlattice for Mid-Short Wavelength Dual-Color Infrared Detector1673-504810.12132/ISSN.1673-5048.2020.0163https://doaj.org/article/cb1cf2a5abc64872a81fee03f596facd2021-10-01T00:00:00Zhttps://www.aeroweaponry.avic.com/fileup/1673-5048/PDF/2020-00163.pdfhttps://doaj.org/toc/1673-5048For higher surface state density of InAs/GaSb type II superlattice materials, it is easy to form conductive oxide layer on the material surface. The first problem to be solved is passivation in the process of preparing infrared devices with InAs/GaSb superlattice materials. Passivation effect and coating quality have great influence on the surface leakage and noise of infrared devices. The method of zinc sulfide coating after anodic fluorination was used to passivate the mid-short wavelength dual-color InAs/GaSb superlattice. The reliability of anodic fluorination is confirmed by Auger electron spectroscopy. The J-V test results at 77 K are used to verify the passivation effect of fluorination and the improvement effect of leakage current density. The results show that the passivation method of zinc sulfide coating after anodic fluorination can effectively suppress the leakage current.Zhang Lixue, Lu Xing, Zhu Xubo, Yao GuanshengEditorial Office of Aero Weaponryarticle\|inas/gasb superlattice\|mbe\|passivation\|dual-color infrared detector\|anodic fluorinationMotor vehicles. Aeronautics. AstronauticsTL1-4050ZHHangkong bingqi, Vol 28, Iss 5, Pp 110-113 (2021)
institution	DOAJ
collection	DOAJ
language	ZH
topic	\|inas/gasb superlattice\|mbe\|passivation\|dual-color infrared detector\|anodic fluorination Motor vehicles. Aeronautics. Astronautics TL1-4050
spellingShingle	\|inas/gasb superlattice\|mbe\|passivation\|dual-color infrared detector\|anodic fluorination Motor vehicles. Aeronautics. Astronautics TL1-4050 Zhang Lixue, Lu Xing, Zhu Xubo, Yao Guansheng Novel Passivation Approach of InAs/GaSb Superlattice for Mid-Short Wavelength Dual-Color Infrared Detector
description	For higher surface state density of InAs/GaSb type II superlattice materials, it is easy to form conductive oxide layer on the material surface. The first problem to be solved is passivation in the process of preparing infrared devices with InAs/GaSb superlattice materials. Passivation effect and coating quality have great influence on the surface leakage and noise of infrared devices. The method of zinc sulfide coating after anodic fluorination was used to passivate the mid-short wavelength dual-color InAs/GaSb superlattice. The reliability of anodic fluorination is confirmed by Auger electron spectroscopy. The J-V test results at 77 K are used to verify the passivation effect of fluorination and the improvement effect of leakage current density. The results show that the passivation method of zinc sulfide coating after anodic fluorination can effectively suppress the leakage current.
format	article
author	Zhang Lixue, Lu Xing, Zhu Xubo, Yao Guansheng
author_facet	Zhang Lixue, Lu Xing, Zhu Xubo, Yao Guansheng
author_sort	Zhang Lixue, Lu Xing, Zhu Xubo, Yao Guansheng
title	Novel Passivation Approach of InAs/GaSb Superlattice for Mid-Short Wavelength Dual-Color Infrared Detector
title_short	Novel Passivation Approach of InAs/GaSb Superlattice for Mid-Short Wavelength Dual-Color Infrared Detector
title_full	Novel Passivation Approach of InAs/GaSb Superlattice for Mid-Short Wavelength Dual-Color Infrared Detector
title_fullStr	Novel Passivation Approach of InAs/GaSb Superlattice for Mid-Short Wavelength Dual-Color Infrared Detector
title_full_unstemmed	Novel Passivation Approach of InAs/GaSb Superlattice for Mid-Short Wavelength Dual-Color Infrared Detector
title_sort	novel passivation approach of inas/gasb superlattice for mid-short wavelength dual-color infrared detector
publisher	Editorial Office of Aero Weaponry
publishDate	2021
url	https://doaj.org/article/cb1cf2a5abc64872a81fee03f596facd
work_keys_str_mv	AT zhanglixueluxingzhuxuboyaoguansheng novelpassivationapproachofinasgasbsuperlatticeformidshortwavelengthdualcolorinfrareddetector
_version_	1718406889866264576

Novel Passivation Approach of InAs/GaSb Superlattice for Mid-Short Wavelength Dual-Color Infrared Detector

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