Controlling Resonator Nonlinearities and Modes through Geometry Optimization
Controlling the nonlinearities of MEMS resonators is critical for their successful implementation in a wide range of sensing, signal conditioning, and filtering applications. Here, we utilize a passive technique based on geometry optimization to control the nonlinearities and the dynamical response...
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| Autores principales: | , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
MDPI AG
2021
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/cc52c77b067c412dbd0992259375b6b6 |
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