Controlling Resonator Nonlinearities and Modes through Geometry Optimization

Controlling the nonlinearities of MEMS resonators is critical for their successful implementation in a wide range of sensing, signal conditioning, and filtering applications. Here, we utilize a passive technique based on geometry optimization to control the nonlinearities and the dynamical response...

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Autores principales:	Amal Z. Hajjaj, Nizar Jaber
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	MEMS resonators nonlinearity tailoring geometry optimization Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/cc52c77b067c412dbd0992259375b6b6
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id	oai:doaj.org-article:cc52c77b067c412dbd0992259375b6b6
record_format	dspace
spelling	oai:doaj.org-article:cc52c77b067c412dbd0992259375b6b62021-11-25T18:23:33ZControlling Resonator Nonlinearities and Modes through Geometry Optimization10.3390/mi121113812072-666Xhttps://doaj.org/article/cc52c77b067c412dbd0992259375b6b62021-11-01T00:00:00Zhttps://www.mdpi.com/2072-666X/12/11/1381https://doaj.org/toc/2072-666XControlling the nonlinearities of MEMS resonators is critical for their successful implementation in a wide range of sensing, signal conditioning, and filtering applications. Here, we utilize a passive technique based on geometry optimization to control the nonlinearities and the dynamical response of MEMS resonators. Also, we explored active technique i.e., tuning the axial stress of the resonator. To achieve this, we propose a new hybrid shape combining a straight and initially curved microbeam. The Galerkin method is employed to solve the beam equation and study the effect of the different design parameters on the ratios of the frequencies and the nonlinearities of the structure. We show by adequately selecting the parameters of the structure; we can realize systems with strong quadratic or cubic effective nonlinearities. Also, we investigate the resonator shape effect on symmetry breaking and study different linear coupling phenomena: crossing, veering, and mode hybridization. We demonstrate the possibility of tuning the frequencies of the different modes of vibrations to achieve commensurate ratios necessary for activating internal resonance. The proposed method is simple in principle, easy to fabricate, and offers a wide range of controllability on the sensor nonlinearities and response.Amal Z. HajjajNizar JaberMDPI AGarticleMEMS resonatorsnonlinearity tailoringgeometry optimizationMechanical engineering and machineryTJ1-1570ENMicromachines, Vol 12, Iss 1381, p 1381 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	MEMS resonators nonlinearity tailoring geometry optimization Mechanical engineering and machinery TJ1-1570
spellingShingle	MEMS resonators nonlinearity tailoring geometry optimization Mechanical engineering and machinery TJ1-1570 Amal Z. Hajjaj Nizar Jaber Controlling Resonator Nonlinearities and Modes through Geometry Optimization
description	Controlling the nonlinearities of MEMS resonators is critical for their successful implementation in a wide range of sensing, signal conditioning, and filtering applications. Here, we utilize a passive technique based on geometry optimization to control the nonlinearities and the dynamical response of MEMS resonators. Also, we explored active technique i.e., tuning the axial stress of the resonator. To achieve this, we propose a new hybrid shape combining a straight and initially curved microbeam. The Galerkin method is employed to solve the beam equation and study the effect of the different design parameters on the ratios of the frequencies and the nonlinearities of the structure. We show by adequately selecting the parameters of the structure; we can realize systems with strong quadratic or cubic effective nonlinearities. Also, we investigate the resonator shape effect on symmetry breaking and study different linear coupling phenomena: crossing, veering, and mode hybridization. We demonstrate the possibility of tuning the frequencies of the different modes of vibrations to achieve commensurate ratios necessary for activating internal resonance. The proposed method is simple in principle, easy to fabricate, and offers a wide range of controllability on the sensor nonlinearities and response.
format	article
author	Amal Z. Hajjaj Nizar Jaber
author_facet	Amal Z. Hajjaj Nizar Jaber
author_sort	Amal Z. Hajjaj
title	Controlling Resonator Nonlinearities and Modes through Geometry Optimization
title_short	Controlling Resonator Nonlinearities and Modes through Geometry Optimization
title_full	Controlling Resonator Nonlinearities and Modes through Geometry Optimization
title_fullStr	Controlling Resonator Nonlinearities and Modes through Geometry Optimization
title_full_unstemmed	Controlling Resonator Nonlinearities and Modes through Geometry Optimization
title_sort	controlling resonator nonlinearities and modes through geometry optimization
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/cc52c77b067c412dbd0992259375b6b6
work_keys_str_mv	AT amalzhajjaj controllingresonatornonlinearitiesandmodesthroughgeometryoptimization AT nizarjaber controllingresonatornonlinearitiesandmodesthroughgeometryoptimization
_version_	1718411225176473600

Controlling Resonator Nonlinearities and Modes through Geometry Optimization

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