Fabrication of parabolic Si nanostructures by nanosphere lithography and its application for solar cells

Abstract We demonstrated fabrication of a parabola shaped Si nanostructures of various periods by combined approach of nanosphere lithography and a single step CF4/O2 reactive ion etch (RIE) process. Silica nanosphere monolayers in a hexagonal array were well deposited by a solvent controlled spin c...

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Autores principales: See-Eun Cheon, Hyeon-seung Lee, Jihye Choi, Ah Reum Jeong, Taek Sung Lee, Doo Seok Jeong, Kyeong-Seok Lee, Wook-Seong Lee, Won Mok Kim, Heon Lee, Inho Kim
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2017
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Acceso en línea:https://doaj.org/article/d3d206703b924c93afa4cc6796aedb4d
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