Micromachined inertial switch for sub‐g monitoring using gravity‐based threshold compensation
Abstract This letter presents the original design of a microelectromechanical systems inertial switch with ultra‐low threshold (∼0.6 g) and great potential for batch manufacturing. The gravity is utilized to narrow the gap between electrodes during operation, defined here as threshold compensation....
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| Autores principales: | , , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
Wiley
2021
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/d49bcc1827a44e1e9b2f4a20472f11be |
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