Micromachined inertial switch for sub‐g monitoring using gravity‐based threshold compensation
Abstract This letter presents the original design of a microelectromechanical systems inertial switch with ultra‐low threshold (∼0.6 g) and great potential for batch manufacturing. The gravity is utilized to narrow the gap between electrodes during operation, defined here as threshold compensation....
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| Auteurs principaux: | , , , |
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| Format: | article |
| Langue: | EN |
| Publié: |
Wiley
2021
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| Sujets: | |
| Accès en ligne: | https://doaj.org/article/d49bcc1827a44e1e9b2f4a20472f11be |
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