ZRO Drift Reduction of MEMS Gyroscopes via Internal and Packaging Stress Release

ZRO Drift Reduction of MEMS Gyroscopes via Internal and Packaging Stress Release

Zero-rate output (ZRO) drift induces deteriorated micro-electromechanical system (MEMS) gyroscope performances, severely limiting its practical applications. Hence, it is vital to explore an effective method toward ZRO drift reduction. In this work, we conduct an elaborate investigation on the impac...

Descripción completa

Guardado en:
Detalles Bibliográficos
Autores principales: Pengfei Xu, Zhenyu Wei, Lu Jia, Yongmei Zhao, Guowei Han, Chaowei Si, Jin Ning, Fuhua Yang
Formato: article
Lenguaje:EN
Publicado: MDPI AG 2021
Materias:
ZRO drift
MEMS gyroscope
internal and packaging stresses
finite element analysis
stress release
Mechanical engineering and machinery
TJ1-1570
Acceso en línea:https://doaj.org/article/d544619cd6784b18a37392f70c99e302
Etiquetas: Agregar Etiqueta
Sin Etiquetas, Sea el primero en etiquetar este registro!

Internet

https://doaj.org/article/d544619cd6784b18a37392f70c99e302

Ejemplares similares