1.3 kV Reverse-Blocking AlGaN/GaN MISHEMT With Ultralow Turn-On Voltage 0.25 V

A reverse-blocking AlGaN/GaN metal-insulator-semiconductor high electron mobility transistor (RB-MISHEMT) is proposed and fabricated. Compared with the conventional MISHEMT with ohmic drain, the proposed device features a hybrid Schottky-ohmic drain with a low work function Tungsten (W), based on wh...

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Autores principales: Haiyong Wang, Wei Mao, Shenglei Zhao, Ming Du, Yachao Zhang, Xuefeng Zheng, Chong Wang, Chunfu Zhang, Jincheng Zhang, Yue Hao
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Publicado: IEEE 2021
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Acceso en línea:https://doaj.org/article/d5d30875a37f4ee5912e703ee162c60c
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spelling oai:doaj.org-article:d5d30875a37f4ee5912e703ee162c60c2021-11-19T00:01:44Z1.3 kV Reverse-Blocking AlGaN/GaN MISHEMT With Ultralow Turn-On Voltage 0.25 V2168-673410.1109/JEDS.2020.3042264https://doaj.org/article/d5d30875a37f4ee5912e703ee162c60c2021-01-01T00:00:00Zhttps://ieeexplore.ieee.org/document/9279331/https://doaj.org/toc/2168-6734A reverse-blocking AlGaN/GaN metal-insulator-semiconductor high electron mobility transistor (RB-MISHEMT) is proposed and fabricated. Compared with the conventional MISHEMT with ohmic drain, the proposed device features a hybrid Schottky-ohmic drain with a low work function Tungsten (W), based on which the state-of-the-art ultralow turn-on voltage (<inline-formula> <tex-math notation="LaTeX">${V} _{\mathrm{ on}}$ </tex-math></inline-formula>) of 0.25 V could be realized without degradation in on-state characteristics. In addition, the fabricated RB-MISHEMT exhibits the excellent reverse blocking voltage of &#x2212;1332 V (at <inline-formula> <tex-math notation="LaTeX">${V} _{\mathrm{ GS}}= 0$ </tex-math></inline-formula> V) and forward blocking voltage of 1315 V (at <inline-formula> <tex-math notation="LaTeX">${V} _{\mathrm{ GS}} = -15$ </tex-math></inline-formula> V) with a specific on-resistance (<inline-formula> <tex-math notation="LaTeX">${R} _{\mathrm{ on,sp}}$ </tex-math></inline-formula>) of 3.5 <inline-formula> <tex-math notation="LaTeX">$\text{m}\Omega $ </tex-math></inline-formula>cm<sup>2</sup>, leading in the highest power figure-of-merit (FOM) of &#x003E; 494 MW/cm<sup>2</sup>. The good thermal stability could also be observed in fabricated RB-MISHEMT. The corresponding operation mechanism of RB-MISHEMT are also revealed by Silvaco ATLAS simulations. These results demonstrate the great potential in power electronics applications.Haiyong WangWei MaoShenglei ZhaoMing DuYachao ZhangXuefeng ZhengChong WangChunfu ZhangJincheng ZhangYue HaoIEEEarticleAlGaN/GaNHEMTreverse blockingultralow turn-on voltagehybrid Schottky-ohmic drain with tungstenElectrical engineering. Electronics. Nuclear engineeringTK1-9971ENIEEE Journal of the Electron Devices Society, Vol 9, Pp 125-129 (2021)
institution DOAJ
collection DOAJ
language EN
topic AlGaN/GaN
HEMT
reverse blocking
ultralow turn-on voltage
hybrid Schottky-ohmic drain with tungsten
Electrical engineering. Electronics. Nuclear engineering
TK1-9971
spellingShingle AlGaN/GaN
HEMT
reverse blocking
ultralow turn-on voltage
hybrid Schottky-ohmic drain with tungsten
Electrical engineering. Electronics. Nuclear engineering
TK1-9971
Haiyong Wang
Wei Mao
Shenglei Zhao
Ming Du
Yachao Zhang
Xuefeng Zheng
Chong Wang
Chunfu Zhang
Jincheng Zhang
Yue Hao
1.3 kV Reverse-Blocking AlGaN/GaN MISHEMT With Ultralow Turn-On Voltage 0.25 V
description A reverse-blocking AlGaN/GaN metal-insulator-semiconductor high electron mobility transistor (RB-MISHEMT) is proposed and fabricated. Compared with the conventional MISHEMT with ohmic drain, the proposed device features a hybrid Schottky-ohmic drain with a low work function Tungsten (W), based on which the state-of-the-art ultralow turn-on voltage (<inline-formula> <tex-math notation="LaTeX">${V} _{\mathrm{ on}}$ </tex-math></inline-formula>) of 0.25 V could be realized without degradation in on-state characteristics. In addition, the fabricated RB-MISHEMT exhibits the excellent reverse blocking voltage of &#x2212;1332 V (at <inline-formula> <tex-math notation="LaTeX">${V} _{\mathrm{ GS}}= 0$ </tex-math></inline-formula> V) and forward blocking voltage of 1315 V (at <inline-formula> <tex-math notation="LaTeX">${V} _{\mathrm{ GS}} = -15$ </tex-math></inline-formula> V) with a specific on-resistance (<inline-formula> <tex-math notation="LaTeX">${R} _{\mathrm{ on,sp}}$ </tex-math></inline-formula>) of 3.5 <inline-formula> <tex-math notation="LaTeX">$\text{m}\Omega $ </tex-math></inline-formula>cm<sup>2</sup>, leading in the highest power figure-of-merit (FOM) of &#x003E; 494 MW/cm<sup>2</sup>. The good thermal stability could also be observed in fabricated RB-MISHEMT. The corresponding operation mechanism of RB-MISHEMT are also revealed by Silvaco ATLAS simulations. These results demonstrate the great potential in power electronics applications.
format article
author Haiyong Wang
Wei Mao
Shenglei Zhao
Ming Du
Yachao Zhang
Xuefeng Zheng
Chong Wang
Chunfu Zhang
Jincheng Zhang
Yue Hao
author_facet Haiyong Wang
Wei Mao
Shenglei Zhao
Ming Du
Yachao Zhang
Xuefeng Zheng
Chong Wang
Chunfu Zhang
Jincheng Zhang
Yue Hao
author_sort Haiyong Wang
title 1.3 kV Reverse-Blocking AlGaN/GaN MISHEMT With Ultralow Turn-On Voltage 0.25 V
title_short 1.3 kV Reverse-Blocking AlGaN/GaN MISHEMT With Ultralow Turn-On Voltage 0.25 V
title_full 1.3 kV Reverse-Blocking AlGaN/GaN MISHEMT With Ultralow Turn-On Voltage 0.25 V
title_fullStr 1.3 kV Reverse-Blocking AlGaN/GaN MISHEMT With Ultralow Turn-On Voltage 0.25 V
title_full_unstemmed 1.3 kV Reverse-Blocking AlGaN/GaN MISHEMT With Ultralow Turn-On Voltage 0.25 V
title_sort 1.3 kv reverse-blocking algan/gan mishemt with ultralow turn-on voltage 0.25 v
publisher IEEE
publishDate 2021
url https://doaj.org/article/d5d30875a37f4ee5912e703ee162c60c
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