Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity

This paper presents result of investigation aimed at the improvement of gas sensitive properties of SnO2 thin film gas sensors (TFGS) by means of high frequency (HF) oxygen plasma treatment and its surface doping. Used in experiments SnO2 films were deposited by spray pyrol...

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Autores principales: Brînzari, Vladimir, Korotcenkov, Ghenadie, Dmitriev, Serghei
Formato: article
Lenguaje:EN
Publicado: D.Ghitu Institute of Electronic Engineering and Nanotechnologies 2005
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Acceso en línea:https://doaj.org/article/d76a8dd7ff1c4d958660d5b502d773b4
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