Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity
This paper presents result of investigation aimed at the improvement of gas sensitive properties of SnO2 thin film gas sensors (TFGS) by means of high frequency (HF) oxygen plasma treatment and its surface doping. Used in experiments SnO2 films were deposited by spray pyrol...
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| Autores principales: | , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
D.Ghitu Institute of Electronic Engineering and Nanotechnologies
2005
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/d76a8dd7ff1c4d958660d5b502d773b4 |
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| Sumario: | This paper presents result of investigation aimed at the improvement of gas sensitive
properties of SnO2 thin film gas sensors (TFGS) by means of high frequency (HF) oxygen
plasma treatment and its surface doping. Used in experiments SnO2 films were deposited by
spray pyrolysis method. It is shown that plasma treatment provides 3-4 times growth of thin
film gas sensitivity. Surface doping of SnO2 films with Pd leads to gas sensitivity increasing
by order. It is concluded that combination of HF oxygen plasma treatment and surface
sensibilization through surface doping is an effective way to considerable improvement of gas
sensitive properties of tin dioxide based TFGS. |
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