Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity
This paper presents result of investigation aimed at the improvement of gas sensitive properties of SnO2 thin film gas sensors (TFGS) by means of high frequency (HF) oxygen plasma treatment and its surface doping. Used in experiments SnO2 films were deposited by spray pyrol...
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D.Ghitu Institute of Electronic Engineering and Nanotechnologies
2005
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oai:doaj.org-article:d76a8dd7ff1c4d958660d5b502d773b42021-11-21T12:13:33ZPlasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity2537-63651810-648Xhttps://doaj.org/article/d76a8dd7ff1c4d958660d5b502d773b42005-01-01T00:00:00Zhttps://mjps.nanotech.md/archive/2005/article/3072https://doaj.org/toc/1810-648Xhttps://doaj.org/toc/2537-6365This paper presents result of investigation aimed at the improvement of gas sensitive properties of SnO2 thin film gas sensors (TFGS) by means of high frequency (HF) oxygen plasma treatment and its surface doping. Used in experiments SnO2 films were deposited by spray pyrolysis method. It is shown that plasma treatment provides 3-4 times growth of thin film gas sensitivity. Surface doping of SnO2 films with Pd leads to gas sensitivity increasing by order. It is concluded that combination of HF oxygen plasma treatment and surface sensibilization through surface doping is an effective way to considerable improvement of gas sensitive properties of tin dioxide based TFGS. Brînzari, VladimirKorotcenkov, GhenadieDmitriev, SergheiD.Ghitu Institute of Electronic Engineering and NanotechnologiesarticlePhysicsQC1-999ElectronicsTK7800-8360ENMoldavian Journal of the Physical Sciences, Vol 4, Iss 1, Pp 98-101 (2005) |
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DOAJ |
| collection |
DOAJ |
| language |
EN |
| topic |
Physics QC1-999 Electronics TK7800-8360 |
| spellingShingle |
Physics QC1-999 Electronics TK7800-8360 Brînzari, Vladimir Korotcenkov, Ghenadie Dmitriev, Serghei Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity |
| description |
This paper presents result of investigation aimed at the improvement of gas sensitive
properties of SnO2 thin film gas sensors (TFGS) by means of high frequency (HF) oxygen
plasma treatment and its surface doping. Used in experiments SnO2 films were deposited by
spray pyrolysis method. It is shown that plasma treatment provides 3-4 times growth of thin
film gas sensitivity. Surface doping of SnO2 films with Pd leads to gas sensitivity increasing
by order. It is concluded that combination of HF oxygen plasma treatment and surface
sensibilization through surface doping is an effective way to considerable improvement of gas
sensitive properties of tin dioxide based TFGS. |
| format |
article |
| author |
Brînzari, Vladimir Korotcenkov, Ghenadie Dmitriev, Serghei |
| author_facet |
Brînzari, Vladimir Korotcenkov, Ghenadie Dmitriev, Serghei |
| author_sort |
Brînzari, Vladimir |
| title |
Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity |
| title_short |
Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity |
| title_full |
Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity |
| title_fullStr |
Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity |
| title_full_unstemmed |
Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity |
| title_sort |
plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity |
| publisher |
D.Ghitu Institute of Electronic Engineering and Nanotechnologies |
| publishDate |
2005 |
| url |
https://doaj.org/article/d76a8dd7ff1c4d958660d5b502d773b4 |
| work_keys_str_mv |
AT brinzarivladimir plasmatreatmentandsurfacesensibilizationoftindioxidefilmsforenhancementofgassensitivity AT korotcenkovghenadie plasmatreatmentandsurfacesensibilizationoftindioxidefilmsforenhancementofgassensitivity AT dmitrievserghei plasmatreatmentandsurfacesensibilizationoftindioxidefilmsforenhancementofgassensitivity |
| _version_ |
1718419153247797248 |