Design and optimization of differential capacitive micro accelerometer for vibration measurement

This paper deals with the design and optimization of a differential capacitive micro accelerometer for better displacement since other types of micro accelerometer lags in sensitivity and linearity. To overcome this problem, a capacitive area-changed technique is adopted to improve the sensitivity e...

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Autores principales: Gomathi Kumar, Balaji Arunachalam, Mrunalini Thangaraj
Formato: article
Lenguaje:EN
Publicado: De Gruyter 2021
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Acceso en línea:https://doaj.org/article/d999ab90e67740218414000adf9e9836
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