Design and optimization of differential capacitive micro accelerometer for vibration measurement

This paper deals with the design and optimization of a differential capacitive micro accelerometer for better displacement since other types of micro accelerometer lags in sensitivity and linearity. To overcome this problem, a capacitive area-changed technique is adopted to improve the sensitivity e...

Descripción completa

Guardado en:

Detalles Bibliográficos
Autores principales:	Gomathi Kumar, Balaji Arunachalam, Mrunalini Thangaraj
Formato:	article
Lenguaje:	EN
Publicado:	De Gruyter 2021
Materias:	mems capacitive accelerometer u-folded suspension minitab 17 software intellisuite 8.6 software Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/d999ab90e67740218414000adf9e9836
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

id	oai:doaj.org-article:d999ab90e67740218414000adf9e9836
record_format	dspace
spelling	oai:doaj.org-article:d999ab90e67740218414000adf9e98362021-12-05T14:10:51ZDesign and optimization of differential capacitive micro accelerometer for vibration measurement0334-89382191-024310.1515/jmbm-2021-0003https://doaj.org/article/d999ab90e67740218414000adf9e98362021-05-01T00:00:00Zhttps://doi.org/10.1515/jmbm-2021-0003https://doaj.org/toc/0334-8938https://doaj.org/toc/2191-0243This paper deals with the design and optimization of a differential capacitive micro accelerometer for better displacement since other types of micro accelerometer lags in sensitivity and linearity. To overcome this problem, a capacitive area-changed technique is adopted to improve the sensitivity even in a wide acceleration range (0–100 g). The linearity is improved by designing a U-folded suspension. The movable mass of the accelerometer is designed with many fingers connected in parallel and suspended over the stationary electrodes. This arrangement gives the differential comb-type capacitive accelerometer. The area changed capacitive accelerometer is designed using Intellisuite 8.6 Software. Design parameters such as spring width and radius, length, and width of the proof mass are optimized using Minitab 17 software. Mechanical sensitivity of 0.3506 μm/g and Electrical sensitivity of 4.706 μF/g are achieved. The highest displacement of 7.899 μm is obtained with a cross-axis sensitivity of 0.47%.Gomathi KumarBalaji ArunachalamMrunalini ThangarajDe Gruyterarticlememscapacitive accelerometeru-folded suspensionminitab 17 softwareintellisuite 8.6 softwareMechanical engineering and machineryTJ1-1570ENJournal of the Mechanical Behavior of Materials, Vol 30, Iss 1, Pp 19-27 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	mems capacitive accelerometer u-folded suspension minitab 17 software intellisuite 8.6 software Mechanical engineering and machinery TJ1-1570
spellingShingle	mems capacitive accelerometer u-folded suspension minitab 17 software intellisuite 8.6 software Mechanical engineering and machinery TJ1-1570 Gomathi Kumar Balaji Arunachalam Mrunalini Thangaraj Design and optimization of differential capacitive micro accelerometer for vibration measurement
description	This paper deals with the design and optimization of a differential capacitive micro accelerometer for better displacement since other types of micro accelerometer lags in sensitivity and linearity. To overcome this problem, a capacitive area-changed technique is adopted to improve the sensitivity even in a wide acceleration range (0–100 g). The linearity is improved by designing a U-folded suspension. The movable mass of the accelerometer is designed with many fingers connected in parallel and suspended over the stationary electrodes. This arrangement gives the differential comb-type capacitive accelerometer. The area changed capacitive accelerometer is designed using Intellisuite 8.6 Software. Design parameters such as spring width and radius, length, and width of the proof mass are optimized using Minitab 17 software. Mechanical sensitivity of 0.3506 μm/g and Electrical sensitivity of 4.706 μF/g are achieved. The highest displacement of 7.899 μm is obtained with a cross-axis sensitivity of 0.47%.
format	article
author	Gomathi Kumar Balaji Arunachalam Mrunalini Thangaraj
author_facet	Gomathi Kumar Balaji Arunachalam Mrunalini Thangaraj
author_sort	Gomathi Kumar
title	Design and optimization of differential capacitive micro accelerometer for vibration measurement
title_short	Design and optimization of differential capacitive micro accelerometer for vibration measurement
title_full	Design and optimization of differential capacitive micro accelerometer for vibration measurement
title_fullStr	Design and optimization of differential capacitive micro accelerometer for vibration measurement
title_full_unstemmed	Design and optimization of differential capacitive micro accelerometer for vibration measurement
title_sort	design and optimization of differential capacitive micro accelerometer for vibration measurement
publisher	De Gruyter
publishDate	2021
url	https://doaj.org/article/d999ab90e67740218414000adf9e9836
work_keys_str_mv	AT gomathikumar designandoptimizationofdifferentialcapacitivemicroaccelerometerforvibrationmeasurement AT balajiarunachalam designandoptimizationofdifferentialcapacitivemicroaccelerometerforvibrationmeasurement AT mrunalinithangaraj designandoptimizationofdifferentialcapacitivemicroaccelerometerforvibrationmeasurement
_version_	1718371692999344128

Design and optimization of differential capacitive micro accelerometer for vibration measurement

Ejemplares similares