Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances
Abstract We designed a new system that eliminates deviations by correcting uncertainty in optical distance measurements in the laser two-color heterodyne interferometer. In simulations, eliminating the uncertainty from the atmosphere, the deviation in the uncertainty of the optical distance was 50 t...
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Main Authors: | , , , , , , |
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Format: | article |
Language: | EN |
Published: |
Nature Portfolio
2017
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Subjects: | |
Online Access: | https://doaj.org/article/ddf18d30b87743c6b01ab4fd03a70149 |
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